Efficient, compact power supply for repetitively pulsed, "triggerless" cathodic arcs

Review of Scientific Instruments

Volumn 70, Issue 12, 1999, Pages 4532-4535

  Anders, André ^a   MacGill, Robert A ^a   McVeigh, Thomas A ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000415107     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1150106     Document Type: Article

References (7)

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2. I. G. Brown, Rev. Sci. Instrum. 65, 3061 (1994).
3. A. Anders, Surf. Coat. Technol. 93, 158 (1998).
4. P. Siemroth, T. Schülke, and T. Witke, Surf. Coat. Technol. 68/69, 314 (1994).
5. T. Witke, T. Schülke, B. Schultrich, P. Siemroth, and J. Vetter, International Conference on Plasma Surface Engineering, Garmisch-Patenkirchen, Germany, 1998.
6. A. Anders, I. G. Brown, R. A. MacGill, and M. R. Dickinson, J. Phys. D: Appl. Phys. 31, 584 (1998).
7. R. A. MacGill, I. G. Brown, and J. E. Galvin, Rev. Sci. Instrum. 61, 580 (1990).