Deposition processes utilizing a new filtered cathodic arc source

Proceedings, Annual Technical Conference - Society of Vacuum Coaters

Volumn , Issue , 1995, Pages 309-316

  Baldwin, D A ^a   Falabella, S ^a  

^a Commonwealth Scientific Corp ^*  (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; CARBON; CATHODES; HARDNESS; ION BOMBARDMENT; MAGNETIC FIELD EFFECTS; PLASMAS; STRESSES; VAPORIZATION;

ARC VAPORIZATION; CATHODIC ARC SOURCES;

DEPOSITION;

EID: 0029430991     PISSN: 07375921     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)