Structural and mechanical properties of amorphous silicon-carbon alloy films deposited by filtered cathodic vacuum arc technique

International Journal of Modern Physics B

Volumn 14, Issue 2-3, 2000, Pages 315-320

  Shi, J R ^a   Shi, X ^a   Sun, Z ^a   Liu, E ^a   Tay, B K ^a   Jin, X Z ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ALLOY; CARBON; SILICON;

CONFERENCE PAPER; FILM; FILTER; HARDNESS; MEASUREMENT; SPECTROSCOPY; STRUCTURE ANALYSIS; SURFACE PROPERTY; TECHNIQUE; VACUUM;

EID: 0034731787     PISSN: 02179792     EISSN: None     Source Type: Journal    
DOI: 10.1142/s0217979200000327     Document Type: Conference Paper

References (20)

1. Diamond films grown on p-type microcrystalline-SiC:H/crystalline-Si substrate
2. A-Si(1-x)C(x)-based transistor performance and the relationship to electrical and optical properties
3. Deposition and characterization of diamond, silicon carbide and gallium nitride films
4. Growth of crystalline 3C-SiC on Si at reduced temperatures by chemical vapor deposition from silacyclobutane
5. Properties of stoichiometric and silicon rich polycrystalline silicon carbide films deposited by chemical vapor deposition on various substrates
6. Compressive-stress-induced formation of thin-film tetrahedral amorphous carbon
7. Properties of filtered-ion-beam-deposited diamondlike carbon as a function of ion energy
8. 3 fraction deposited using a filtered cathodic arc
9. Hard Amorphous (Diamond-Like) Carbons
10. Effect of rapid thermal annealing on both the stress and the bonding states of a-SiC:H films
11. Infrared and x-ray photoelectron spectroscopy studies of as-prepared and furnace-annealed rf sputtered amorphous silicon carbide films
12. Band structure of carbonated amorphous silicon studied by optical, photoelectron, and x-ray spectroscopy
13. Modification of tetrahedral amorphous carbon film by concurrent Ar ion bombardment during deposition
14. Raman spectroscopy on amorphous carbon films
15. Optical study of silicon-containing amorphous hydrogenated carbon
16. Growth of clean amorphous silicon-carbon alloy films by hot-filament assisted chemical vapor deposition technique
17. Characterization of the silicon network disorder in hydrogenated amorphous silicon carbide alloys with low carbon concentrations