Tungsten-containing amorphous carbon films deposited by pulsed vacuum arc

Thin Solid Films

Volumn 342, Issue 1, 1999, Pages 100-107

  Monteiro, Othon R ^a   Delplancke Ogletree, Marie Paule ^b   Brown, Ian G ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b UNIVERSITÉ LIBRE DE BRUXELLES   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; CARBON; DEPOSITION; PLASMA SOURCES; RAMAN SPECTROSCOPY; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICON; TRANSMISSION ELECTRON MICROSCOPY; TUNGSTEN; VACUUM TECHNOLOGY; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

PULSED VACUUM ARC DEPOSITION;

AMORPHOUS FILMS;

EID: 0032651503     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(98)01441-2     Document Type: Article

References (20)

1. M.W. Geis, M.A. Tamor in: Encyclopedia of Applied Physics, Vol. 5, VCH, 1993, p. 1.
2. Pharr G.M., Callahan D.L., McAdams S.D., Tsui T.Y., Anders S., Anders A., Ager III J.W., Brown I.G., Bhatia S., Silva S.R.P., Robertson J. Appl. Phys. Lett. 68:1996;779.
3. Fallon P.J., Veerasamy V.S., Davis C.A., Robertson J., Amaratunga G.A.J., Milne W.I., Koskinen J. Phys. Rev. B. 48:1993;4777.
4. Voevodin A.A., Walck S.D., Solomon J.S., John P.J., Ingram D.C., Donley M.S., Zabinski J.S. J. Vac. Sci. Technol. A. 14:1996;1927.
5. U. Muller, R. Hauert, M. Tobler, 6th Eur. Conf. on Applications of Surface and Interface Analysis, ECASIA'95, Montreux, Switzerland, 1995.
6. Oral B., Hauert R., Muller U., Ernst K.H. Diamond Relat. Mater. 4:1995;482.
7. Oral B., Ernst K.H., Schmutz C.J. Diamond Relat. Mater. 5:1996;932.
8. Dimigen H., Klages C.P. Surf. Coat. Technol. 49:1991;543.
9. O.R.Monteiro, M.P. Delplancke-Ogletree, I.G. Brown, J.W. Ager III in: Materials Modification and Synthesis by Ion Beam Processing, Materials Research Society Symp. Proc., Vol. 438, 1996, pp. 599-604.
10. J.W. Ager III, S. Anders, A. Anders, B. Wei, X.Y. Yao, I.G. Brown, K. Komvopolous, LBNL Internal Report 36046, 1994.
11. O.R. Monteiro, Z. Wang, P. Hou, I.G. Brown, 10th Int. Conf. on Ion Beam Modification of Materials (IBMM-96), Albuquerque, NM, 1996, in Nucl. Instrum. Methods B, in press.
12. Delplancke-Ogletree M.P., Monteiro O.R. J. Vac. Sci. Technol. A. 15:1997;1.
13. Monteiro O.R., Delplancke-Ogletree M.P., Lo R.Y., Winand R., Brown I.G. Surf. Coat. Technol. 94-95:1997;220.
14. Anders A., Anders S., Brown I.G., Dickinson M.R., MacGill R.A. J. Vac. Sci. Technol. B. 12:1994;815.
15. Anders S., Anders A., Brown I. J. Appl. Phys. 74:1993;4329.
16. Ager III J.W., Anders S., Anders A., Brown I.G. Appl. Phys. Lett. 66:(25):1995;3444.
17. Brown I.G. Rev. Sci. Instrum. 65:(10):1994;3061.
18. C.S. Barret, T.B. Massalski, Structure of Metals, 3rd edn. Pergamon, Oxford, 1982.
19. Robertson J. Diamond Relat. Mater. 2:1993;984.
20. Davis C.A. Thin Solid Films. 226:1993;30.