SCOPUS 정보 검색 플랫폼

Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films

Volumn 19, Issue 5, 2001, Pages 2604-2611

Influence of elastic-electron scattering on measurements of silicon dioxide film thicknesses by x-ray photoelectron spectroscopy

(2) Powell, C J a Jablonski, A b

a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY (United States)

b INSTITUTE OF PHYSICAL CHEMISTRY (Poland)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON EMISSION; ELECTRON SCATTERING; ERROR ANALYSIS; MAGNESIUM PRINTING PLATES; PHOTOEMISSION; SILICA; THICKNESS MEASUREMENT; X RAY PHOTOELECTRON SPECTROSCOPY; X RAYS;

EFFECTIVE ATTENUATION LENGTHS (EAL); PHOTOELECTRONS;

THIN FILMS;

EID: 0035443411 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.1397463 Document Type: Article

Times cited : (35)

References (38)

1
- 0004245602
- Semiconductor Industry Association, Austin, TX
- (1999) International Technology Roadmap for Semiconductors, 1999

2
- 0032669575
- (1999) Mater. Sci. Semicond. Process. , vol.2 , pp. 103
- Diebold, A.C.¹ Venables, D.² Chabal, Y.³ Muller, D.⁴ Weldon, M.⁵ Garfunkel, E.⁶

3
- 0034350496
- (2000) J. Vac. Sci. Technol. B , vol.18 , pp. 440
- Cole, D.A.¹

4
- 0027642007
- (1993) Surf. Interface Anal. , vol.20 , pp. 771
- Jablonski, A.¹ Powell, C.J.²

5
- 0001699807
- (1999) J. Electron Spectrosc. Relat. Phenom. , vol.100 , pp. 137
- Jablonski, A.¹ Powell, C.J.²

6
- 0003240191
- (2000) J. Electron Spectrosc. Relat. Phenom. , vol.107 , pp. 201

7
- 0003104127
- unpublished
- Jablonski, A.¹ Powell, C.J.²

8
- 0016015486
- (1975) J. Vac. Sci. Technol. , vol.12 , pp. 305
- Flitsch, M.¹ Raider, S.I.²

9
- 84984288139
- (1975) Krist. Tech. , vol.10
- Leonhardt, G.¹ Bilz, H.J.²

10
- 0003328069
- (1976) Chem. Phys. Lett. , vol.44 , pp. 225
- Hill, J.M.¹ Royce, D.G.² Fadley, C.S.³ Wagner, L.F.⁴ Grunthaner, F.J.⁵

11
- 0001059493
- (1979) Surf. Sci. , vol.84 , pp. 355
- Ishizaka, A.¹ Iwata, S.² Kamigaki, J.³

12
- 0010024965
- (1979) J. Electron Spectrosc. Relat. Phenom. , vol.16 , pp. 463
- Ebel, M.F.¹ Lieble, W.²

13
- 0001551720
- (1979) Surf. Sci. , vol.86 , pp. 555
- Hattori, T.¹ Ishina, I.²

14
- 0000721085
- (1980) Surf. Sci. , vol.99 , pp. 681
- Vasquez, R.P.¹ Grunthaner, F.J.²

15
- 45549117634
- (1988) Surf. Sci. , vol.197
- Hochella, M.F.¹ Carim, A.H.²

16
- 0001499434
- (1992) J. Electron Spectrosc. Relat. Phenom. , vol.60 , pp. 117
- Fulghum, J.E.¹ Stokell, R.² McGuire, G.E.³ Patnaik, B.⁴ Yu, N.⁵ Zhao, Y.J.⁶ Parikh, N.⁷

17
- 0028460845
- (1994) Surf. Interface Anal. , vol.22 , pp. 51
- Ebel, M.F.¹ Ebel, H.² Hoffman, A.³ Svagera, R.⁴

18
- 84901281048
- (1995) J. Vac. Sci. Technol. A , vol.13 , pp. 2671
- Yano, F.¹ Hiraoka, A.² Itoga, T.³ Kojima, H.⁴ Kanehori, K.⁵ Mitsui, Y.⁶

19
- 1242342609
- (1997) Appl. Phys. Lett. , vol.71 , pp. 2764
- Lu, Z.H.¹ McCaffrey, J.P.² Brar, B.³ Wilk, G.D.⁴ Wallace, R.M.⁵ Feldman, L.C.⁶ Tay, S.P.⁷

20
- 0033240593
- (1999) J. Phys. Chem. Ref. Data , vol.28 , pp. 19
- Powell, C.J.¹ Jablonski, A.²

21
- 0033896710
- (2000) Surf. Interface Anal. , vol.29 , pp. 108
- Powell, C.J.¹ Jablonski, A.²

22
- 0003175846
- Characterization and Metrology for ULSI Technology-2000, edited by D. G. Seiler, A. C. Diebold, T. J. Shaffner, R. McDonald, W. M. Bullis, P. J. Smith, and E. M. Secula, American Institute of Physics, Melville, New York
- (2001) AIP Conf. Proc. , vol.1550 , pp. 591
- Powell, C.J.¹ Jablonski, A.²

23
- 17444437794
- (2001) J. Electron Spectrosc. Relat. Phenom. , vol.114-116 , pp. 1139
- Powell, C.J.¹ Jablonski, A.²

24
- 0031210313
- (1997) Surf. Interface Anal. , vol.25 , pp. 683
- Tilinin, I.S.¹ Zemek, J.² Hucek, S.³

25
- 0000204942
- (1995) J. Electron Spectrosc. Relat. Phenom. , vol.74 , pp. 207
- Jablonski, A.¹ Tilinin, I.S.²

26
- 0001391458
- (1996) Phys. Rev. B , vol.54 , pp. 10927
- Jablonski, A.¹ Tilinin, I.S.² Powell, C.J.³

27
- 0001261635
- (1997) J. Electron Spectrosc. Relat. Phenom. , vol.87 , pp. 127
- Tilinin, I.S.¹ Jablonski, A.² Zemek, J.³ Hucek, S.⁴

28
- 0032025823
- (1998) Surf. Interface Anal. , vol.26 , pp. 182
- Zemek, J.¹ Hucek, S.² Jablonski, A.³ Tilinin, I.S.⁴

29
- 0000105939
- (1979) At. Data Nucl. Data Tables , vol.23 , pp. 443
- Band, I.M.¹ Kharitonov, Yu.I.² Trzhaskovskaya, M.B.³

30
- 0026371472
- (1991) Surf. Interface Anal. , vol.17 , pp. 911
- Tanuma, S.¹ Powell, C.J.² Penn, D.R.³

31
- 0026401803
- (1991) Surf. Interface Anal. , vol.17 , pp. 927
- Tanuma, S.¹ Powell, C.J.² Penn, D.R.³

32
- 0004124599
- National Institute of Standards and Technology, Gaithersburg, MD
- (2000) NIST Electron Elastic-Scattering Cross-Section Database, Ver. 2.0
- Jablonski, A.¹

33
- 0001205766
- (1998) Phys. Rev. B , vol.58 , pp. 16470
- Jablonski, A.¹

34
- 0027559877
- (1993) Surf. Interface Anal. , vol.20 , pp. 243
- Seah, M.P.¹

35
- 0003037887
- (1995) J. Electron Spectrosc. Relat. Phenom. , vol.73 , pp. 25
- Cumpson, P.J.¹

36
- 0032666974
- (1999) Surf. Sci. , vol.432 , pp. 211
- Jablonski, A.¹ Tougaard, S.²

37
- 0031168751
- (1997) Surf. Interface Anal. , vol.25 , pp. 430
- Cumpson, P.J.¹ Seah, M.P.²

38
- 0035425735
- (2001) Surf. Sci. , vol.488
- Powell, C.J.¹ Jablonski, A.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.