Effects of elastic-electron scattering on measurements of silicon dioxide film thicknesses by X-ray photoelectron spectroscopy

Journal of Electron Spectroscopy and Related Phenomena

Volumn 114-116, Issue , 2001, Pages 1139-1143

  Powell, C J ^a   Jablonski, A ^b  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b INSTITUTE OF PHYSICAL CHEMISTRY   (Poland)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON SCATTERING; THICK FILMS; THICKNESS MEASUREMENT; X RAY PHOTOELECTRON SPECTROSCOPY;

ELASTIC SCATTERING;

SILICA;

EID: 17444437794     PISSN: 03682048     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0368-2048(00)00254-1     Document Type: Article

References (14)

1. Jablonski A., Powell C.J. J. Electron Spectrosc. Relat. Phenom. 100:1999;137.
2. Tilinin I.S., Zemek J., Hucek S. Surf. Interface Anal. 25:1997;683.
3. Jablonski A., Tilinin I.S. J. Electron Spectrosc. Relat. Phenom. 74:1995;207.
4. Jablonski A., Tilinin I.S., Powell C.J. Phys. Rev. B. 54:1996;10927.
5. Tilinin I.S., Jablonski A., Zemek J., Hucek S. J. Electron Spectrosc. Relat. Phenom. 87:1997;127.
6. Zemek J., Hucek S., Jablonski A., Tilinin I.S. Surf. Interface Anal. 26:1998;182.
7. Band I.M., Kharitonov Yu.I., Trzhaskovskaya M.B. At. Data Nucl. Data Tables. 23:1979;443.
8. Tanuma S., Powell C.J., Penn D.R. Surf. Interface Anal. 17:1991;911.
9. Tanuma S., Powell C.J., Penn D.R. Surf. Interface Anal. 17:1991;927.
10. Jablonski A. NIST Electron Elastic-Scattering Cross-Section Database. Version 2.0. 2000;National Institute of Standards and Technology, Gaithersburg, MD.
11. Jablonski A. Phys. Rev. B. 58:1998;16470.
12. C.J. Powell, A. Jablonski (to be published).
13. Seah M.P. Surf. Interface Anal. 20:1993;243.
14. Cumpson P.J., Seah M.P. Surf. Interface Anal. 25:1997;430.