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Journal of Microelectromechanical Systems

Volumn 10, Issue 2, 2001, Pages 302-309

Plastic deformation magnetic assembly (PDMA) of out-of-plane microstructures: Technology and application

(4) Zou, Jun a Chen, Jack b Liu, Chang b Schutt Ainé, José E b

a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN (United States)

b University of Illinois at Urbana Champaign (United States)

Author keywords

Magnetic actuation; Plastic deformation; Three dimensional (3 D) assembly; Vertical inductor

Indexed keywords

ASSEMBLY; CRYSTAL MICROSTRUCTURE; ELECTRIC INDUCTORS; MAGNETIC FIELD EFFECTS; MAGNETIC MATERIALS; MICROMACHINING; PLASTIC DEFORMATION; SUBSTRATES; THREE DIMENSIONAL;

MAGNETIC ACTUATION; PLASTIC DEFORMATION MAGNETIC ASSEMBLY; THREE DIMENSIONAL ASSEMBLY; VERTICAL PLANAR SPIRAL INDUCTOR;

MICROELECTROMECHANICAL DEVICES;

EID: 0035369655 PISSN: 10577157 EISSN: None Source Type: Journal
DOI: 10.1109/84.925791 Document Type: Article

Times cited : (85)

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