Automated assembly of flip-up micromirrors

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 1, Issue , 1997, Pages 347-350

  Reid, J Robert ^a   Bright, Victor M ^a   Comtois, J H ^a  

^a AIR FORCE INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ASSEMBLY; MIRRORS; SCANNING; SUBSTRATES;

AUTOMATED ASSEMBLY; FLIP UP MICROMIRRORS; VERTICAL THERMAL ACTUATORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0030659897     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)