Fabrication processes and characteristics of microelectromechanical system using PZT films

Materials Research Society Symposium - Proceedings

Volumn 444, Issue , 1997, Pages 143-148

  Yoon, Y S ^a   Kim, J H ^a   Lim, T H ^a   Bonne, U A ^a   Schmidt, A M ^a   Polla, D L ^a  

^a UNIVERSITY OF MINNESOTA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; DECOMPOSITION; ELECTRODES; FABRICATION; INFRARED DETECTORS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; SILICON WAFERS; SURFACES; THIN FILMS;

PIEZOELECTRIC CANTILEVER BEAM MICROACCELEROMETERS; PIEZOELECTRIC FILMS;

OXIDES;

EID: 0030643645     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)