A silicon resonant sensor structure for coriolis mass-flow measurements

Journal of Microelectromechanical Systems

Volumn 6, Issue 2, 1997, Pages 119-125

  Enoksson, Peter ^a   Stemme, Göran ^a,b,c,d   Stemme, Erik ^{a,b,d,e,f,g,h,i,j}  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

^b CHALMERS UNIVERSITY OF TECHNOLOGY   (Sweden)

^c Silicon Sensor Research Group

^d Chalmers University of Technology ^*

^e DARMSTADT UNIVERSITY OF TECHNOLOGY   (Germany)

^f Res Institute of National Defense   (Sweden)

^g INSTITUTE FOR ADVANCED STUDY   (United States)

^h Facit   (Sweden)

ⁱ Electronics Division

^j Roy Swed Acad of Eng Sciences

more..

Author keywords

Coriolis; Liquid; Mass flow; Resonance; Silicon; Tube

Indexed keywords

FLOW MEASUREMENT; FLOW OF FLUIDS; FORCE MEASUREMENT; LIQUIDS; MASS TRANSFER; OPTICAL SENSORS; VIBRATIONS (MECHANICAL);

MASS FLOW MEASUREMENT;

SILICON SENSORS;

EID: 0031163307     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.585789     Document Type: Article

References (7)

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2. J. E. Smith, "Method and structure for flow measurement," U.S. Patent 4 187 721, 1980.
3. J. E. Smith and D. R. Cage, "Parallel path Coriolis mass flow rate meter," U.S. Patent 4 491 025, 1985.
4. A. M. Young, "Coriolis-based mass flow measurement," Sensors, vol. 2, pp. 6-10, Dec. 1985.
5. P. Enoksson, G. Stemme, and E. Stemme, "Fluid density sensor based on resonance vibration," Sens. Actuators A, vol. A46-47, pp. 327-331, Jan.-Apr. 1995.
6. _, "Vibration modes of a resonant silicon tube density sensor," IEEE J. Microelectromech. Syst., vol. 5, no. 1, pp. 39-44, 1996.
7. E. O. Doebelin, Measurement Systems Application and Design. New York: McGraw-Hill, 1990, pp. 602-605.