Electric force microscopy with a single carbon nanotube tip

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4344, Issue , 2001, Pages 58-71

  Dagata, J A ^a   Chien, F S S ^b   Gwo, S ^b   Morimoto, K ^c   Inoue, T ^d   Itoh, J ^d   Yokoyama, H ^d  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^c PANASONIC CORPORATION   (Japan)

^d dElectrotecical Laboratory   (Japan)

Author keywords

Carbon nanotube; Electric force microscopy; Lithography; Scanned probe microscopy; Silicon on insulator

Indexed keywords

CURRENT VOLTAGE CHARACTERISTICS; LITHOGRAPHY; MICROSCOPIC EXAMINATION; SILICON ON INSULATOR TECHNOLOGY;

ELECTRIC FORCE MICROSCOPY; SCANNING PROBE MICROSCOPY;

CARBON NANOTUBES;

EID: 0034757294     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.436728     Document Type: Article

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