Imaging integrated circuit dopant profiles with the force-based scanning Kelvin probe microscope

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 1, 1996, Pages 440-446

  Hochwitz, Todd ^a   Henning, Albert K ^a   Levey, Chris ^a   Daghlian, Charles ^a   Slinkman, James ^b   Never, James ^b   Kaszuba, Phil ^b   Gluck, Robert ^b   Wells, Randy ^b   Pekarik, John ^b   Finch, Robert ^b  

^a DARTMOUTH COLLEGE   (United States)

^b IBM MICROELECTRONICS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0009333287     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588491     Document Type: Article

References (20)

1. Y. Martin, D. W. Abraham, and H. K. Wickramasinghe, Appl. Phys. Lett. 52, 1103 (1988).
2. D. W. Abraham, C. C. Williams, J. Slinkman, and H. K. Wickramasinghe, J. Vac. Sci. Technol. B 9, 703 (1991).
3. J. M. R. Weaver and D. W. Abraham, J. Vac. Sci. Technol. B 9, 1559 (1991).
4. J. M. R. Weaver and H. K. Wickramasinghe, J. Vac. Sci. Technol. B 9, 1562 (1991).
5. M. Nonnenmacher, M. O'Boyle, and H. K. Wickramasinghe, Ultramicroscopy 42-44, 268 (1992).
6. A. K. Henning, T. Hochwitz, J. Slinkman, J. Never, S. Hoffmann, P. Kaszuba, and C. Daghlian, J. Appl. Phys. 77, 1888 (1995).
7. A. Kikukawa, S. Hosaka, and R. Imura, Appl. Phys. Lett. 66, 3510 (1995).
8. Y. Martin, C. C. Williams, and H. K. Wickramasinghe, J. Appl. Phys. 61, 4723 (1987).
9. M. Nonnenmacher, M. P. O'Boyle, and H. K. Wickramasinghe, Appl. Phys. Lett. 58, 2921 (1991).
10. D. Sarid, Scanning Force Microscopy with Applications to Electric, Magnetic, and Atomic Forces, Oxford Series in Optical and Imaging Sciences (Oxford University Press, New York, 1991).
11. Y. J. Huang, J. Slinkman, and C. C. Williams, Ultramicroscopy 42-44, 298 (1992).
12. T. Hochwitz, A. K. Henning, C. Levey, C. Daghlian, and J. Slinkman, J. Vac. Sci. Technol. 14, 457 (1996).
13. S. Hudlet, M. S. Jean, B. Roulet, J. Berger, and C. Guthmann, J. Appl. Phys. 77, 3308 (1995).
14. C. Donolato, J. Appl. Phys. 78, 684 (1995).
15. Unpublished.
16. G. E. Bridges and D. J. Thomson, Ultramicroscopy 42-44, 321 (1992).
17. The PN Junction Diode, The Modular Series on Solid State Devices, edited by G. Neudeck and R. F. Pierret (Addison-Wesley, Reading, MA, 1989), Vol. 2.
18. T. Hochwitz, A. K. Henning, C. Levey, C. Daghlian, J. Slinkman, J. Never, P. Kaszuba, R. Gluck, S. Hoffmann, and M. O'Boyle, in 1994 Fall Meeting of the IBM Failure Analysis Technical Exchange (IBM Microelectronics, Burlington, VT, 1994).
19. T. Hochwitz, A. K. Henning, C. Daghlian, R. Bolam, P. Coutu, R. Gluck, and J. Slinkman, in Proceedings of the International Reliability Physics Symposium (IEEE, New York, 1995), pp. 217-222.
20. M. O'Boyle and T. Hwang (private communication).