Physical oxide thickness extraction and verification using quantum mechanical simulation

Technical Digest - International Electron Devices Meeting, IEDM

Volumn , Issue , 1997, Pages 869-872

  Bowen, Chris ^a   Fernando, Chenjing L ^a   Klimeck, Gerhard ^a   Chatterjee, Amitava ^a   Blanks, Dan ^a   Lake, Roger ^a   Hu, Jerry ^a   Davis, Joseph ^a   Kulkarni, Mak ^a   Hattangady, Sunil ^a   Chen, Ih Chin ^a  

^a TEXAS INSTRUMENTS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MULTIBAND HARTREE SELF CONSISTENT POISSON SOLVER; PHYSICAL OXIDE THICKNESS EXTRACTION; QUANTUM MECHANICAL SIMULATION;

CAPACITANCE MEASUREMENT; COMPUTER SIMULATION; ELECTRIC CURRENT MEASUREMENT; ELECTRON TUNNELING; MOS DEVICES; QUANTUM THEORY; TITANIUM NITRIDE; VOLTAGE MEASUREMENT;

GATES (TRANSISTOR);

EID: 84886448116     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)