Microprocessing at the fingertips

Journal of Micromechanics and Microengineering

Volumn 8, Issue 4, 1998, Pages 251-262

  Thornell, Greger ^a   Johansson, Stefan ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; DRY ETCHING; ELECTRODEPOSITION; LITHOGRAPHY; MICROELECTRONIC PROCESSING; PHOTOPOLYMERIZATION;

ELECTRODISCHARGE MACHINING; LASER CHEMICAL PROCESSING; MICROPROCESSING; STENCIL PROCESSING; WET ETCHING;

MICROMACHINING;

EID: 0032291620     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/8/4/001     Document Type: Article

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