Constructing single- and multiple-helical microcoils and characterizing their performance as components of microinductors and microelectromagnets

Journal of Microelectromechanical Systems

Volumn 6, Issue 3, 1997, Pages 184-191

  Rogers, John A ^a   Jackman, Rebecca J ^b   Whitesides, George M ^b  

^a LUCENT TECHNOLOGIES   (United States)

^b HARVARD UNIVERSITY   (United States)

Author keywords

Coils; Electromagnets; Fabrication; Ferromagnetic materials devices; Inductors; Microelectromechanical devices

Indexed keywords

ELECTRIC INDUCTORS; ELECTRIC WIRE; ELECTROMAGNETS; FABRICATION; FERROMAGNETIC MATERIALS; MAGNETIC CORES; MICROELECTROMECHANICAL DEVICES; PERFORMANCE; PHOTOLITHOGRAPHY;

FERROMAGNETIC DEVICES; MICROCONTACT PRINTING; MICROELECTROMAGNETS; MICROINDUCTORS;

ELECTRIC COILS;

EID: 0031234572     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.623106     Document Type: Article

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