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Volumn 23, Issue 4, 1999, Pages 229-235

Microstructure grooves with a width of less than 50 μm cut with ground hard metal micro end mills

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROLYTIC POLISHING; INJECTION MOLDING; MILLING (MACHINING); MOLDS; PRECISION ENGINEERING;

EID: 0032645393     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0141-6359(99)00011-2     Document Type: Article
Times cited : (210)

References (15)
  • 3
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    • Multi-functional valve components fabricated by combination of LIGA processes and high-precision mechanical engineering
    • Ruzzu A, Fahrenberg J, Heckele M, Schaller Th. Multi-functional valve components fabricated by combination of LIGA processes and high-precision mechanical engineering. Microsyst Technol 1998;4(3):128-31.
    • (1998) Microsyst Technol , vol.4 , Issue.3 , pp. 128-131
    • Ruzzu, A.1    Fahrenberg, J.2    Heckele, M.3    Schaller, Th.4
  • 4
    • 0001329821 scopus 로고    scopus 로고
    • High aspect ratio multi-level mold inserts fabricated by mechanical micro machining and deep etch X-ray lithography
    • Fahrenberg J, Schaller Th, Bacher W, El-Kholi A, Schomburg WK. High aspect ratio multi-level mold inserts fabricated by mechanical micro machining and deep etch X-ray lithography. Microsyst Technol 1996;2:174-7.
    • (1996) Microsyst Technol , vol.2 , pp. 174-177
    • Fahrenberg, J.1    Schaller, Th.2    Bacher, W.3    El-Kholi, A.4    Schomburg, W.K.5
  • 7
    • 0041385306 scopus 로고
    • Mechanische Mikrotechnik für Abformwerkzeuge und Kleinserien
    • Forschungszentrum Karlsruhe, 2. Statuskolloquium des Projektes Mikrosystemtechnik
    • Schaller Th, Bier W, Linder G, Schubert K. Mechanische Mikrotechnik für Abformwerkzeuge und Kleinserien. Forschungszentrum Karlsruhe, 2. Statuskolloquium des Projektes Mikrosystemtechnik, Wissenschaftliche Berichte FZKA 5670, 1995:45-50.
    • (1995) Wissenschaftliche Berichte FZKA , vol.5670 , pp. 45-50
    • Schaller, Th.1    Bier, W.2    Linder, G.3    Schubert, K.4
  • 9
    • 85031633945 scopus 로고    scopus 로고
    • MEDIDIA Diamantwerkzeuge GmbH: Tiefensteiner Str. 237, D-55743 Idar-Oberstein, Germany
    • MEDIDIA Diamantwerkzeuge GmbH: Tiefensteiner Str. 237, D-55743 Idar-Oberstein, Germany.
  • 10
    • 85031624594 scopus 로고    scopus 로고
    • ezi Eskenazi SA: 24, rue Joseph-Girard, CH-1227 Carouge-Geneve, Switzerland
    • ezi Eskenazi SA: 24, rue Joseph-Girard, CH-1227 Carouge-Geneve, Switzerland.
  • 11
    • 0030108714 scopus 로고    scopus 로고
    • Development of the micro milling process for high aspect ratio microstructures
    • Friedrich C.R., Vasile M.J. Development of the micro milling process for high aspect ratio microstructures. J MEMS. 5:(1):1996;33-38.
    • (1996) J MEMS , vol.5 , Issue.1 , pp. 33-38
    • Friedrich, C.R.1    Vasile, M.J.2
  • 12
    • 0032116449 scopus 로고    scopus 로고
    • Direct fabrication of deep X-ray lithography masks by micromechanical milling
    • Friedrich C., Coane P., Goettert J., Gopinathin N. Direct fabrication of deep X-ray lithography masks by micromechanical milling. Prec Eng. 22:(3):1998;164-173.
    • (1998) Prec Eng , vol.22 , Issue.3 , pp. 164-173
    • Friedrich, C.1    Coane, P.2    Goettert, J.3    Gopinathin, N.4
  • 15
    • 0020883692 scopus 로고
    • Particle size distribution analysis by scattered light measurements using an optically defined measuring volume
    • Umhauer H. Particle size distribution analysis by scattered light measurements using an optically defined measuring volume. J Aerosol Sci. 14:(6):1983;765-770.
    • (1983) J Aerosol Sci , vol.14 , Issue.6 , pp. 765-770
    • Umhauer, H.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.