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Annual Review of Materials Science

Volumn 30, Issue , 2000, Pages 431-449

Advances in situ ultra-high vacuum electron microscopy: Growth of SiGe on Si

(2) Tromp, Ruud M a Ross, Frances M a

a IBM T J WATSON RESEARCH CENTER (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FILM GROWTH; SEMICONDUCTING FILMS; SEMICONDUCTING SILICON; SEMICONDUCTING SILICON COMPOUNDS; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY;

LOW ENERGY ELECTRON MICROSCOPY (LEEM); ULTRAHIGH VACUUM (UHV) ELECTRON MICROSCOPY;

HIGH RESOLUTION ELECTRON MICROSCOPY;

EID: 0033692371 PISSN: 00846600 EISSN: None Source Type: Journal
DOI: 10.1146/annurev.matsci.30.1.431 Document Type: Article

Times cited : (25)

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