Infrared micromirror array with large pixel size and large deflection angle

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 1, Issue , 1997, Pages 75-78

  Wagner, B ^a   Reimer, K ^a   Maciossek, A ^a   Hofmann, U ^a  

^a FRAUNHOFER INSTITUTE FOR SILICON TECHNOLOGY ISIT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ELECTROPLATING; ELECTROSTATICS; INFRARED RADIATION; PHOTOLITHOGRAPHY; ULTRAVIOLET RADIATION;

INFRARED MICROMIRROR ARRAY; LARGE GAP ELECTROSTATIC ACTUATION;

MIRRORS;

EID: 0030674945     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)