Elastic properties of hydrogen-free amorphous carbon thin films and their relation with carbon-carbon bonding

Thin Solid Films

Volumn 353, Issue 1, 1999, Pages 208-213

  Logothetidis, S ^a   Charitidis, C ^a  

^a ARISTOTLE UNIVERSITY OF THESSALONIKI   (Greece)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; BONDING; CARBON; ELASTIC MODULI; ELLIPSOMETRY; HARDNESS; ION BOMBARDMENT; MAGNETRON SPUTTERING; MULTILAYERS; SPUTTER DEPOSITION; STIFFNESS; TEMPERATURE;

CONTINUOUS STIFFNESS MEASUREMENTS; CONVENTIONAL INDENTATION; DEPTH SENSING TECHNIQUES; ELASTIC PROPERTIES;

THIN FILMS;

EID: 0033310270     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(99)00425-3     Document Type: Article

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