SCOPUS 정보 검색 플랫폼

Materials Science and Engineering B

Volumn 46, Issue 1-3, 1997, Pages 119-123

Amorphous carbon films rich in diamond deposited by magnetron sputtering

(2) Logothetidis, S a Gioti, M a

a ARISTOTLE UNIVERSITY OF THESSALONIKI (Greece)

Author keywords

Carbon films; Magnetron sputtering; Spectroscopic ellipsometry; Stress measurements

Indexed keywords

CHEMICAL BONDS; DIAMOND FILMS; ELLIPSOMETRY; MAGNETRON SPUTTERING; RESIDUAL STRESSES; SPECTROSCOPIC ANALYSIS; SPUTTER DEPOSITION; STRESS ANALYSIS; VOLUME FRACTION;

CANTILEVER LASER TECHNIQUE; SPECTROSCOPIC ELLIPSOMETRY (SE);

AMORPHOUS FILMS;

EID: 0000666979 PISSN: 09215107 EISSN: None Source Type: Journal
DOI: 10.1016/S0921-5107(97)00009-3 Document Type: Article

Times cited : (32)

References (13)

1
- 0010005593
- D.R. McKenzie, D.A. Muller and B.A. Paithorpe, Phys. Rev. Lett., 67 (1991) 773.
- (1991) Phys. Rev. Lett. , vol.67 , pp. 773
- McKenzie, D.R.¹ Muller, D.A.² Paithorpe, B.A.³

2
- 0026398848
- D.R. McKenzie, D.A. Muller, E. Kravtchinskaia, D. Segal, D.J.H. Cockayne, G. Amaratunga and R. Silva, Thin Solid Films, 206 (1991) 198.
- (1991) Thin Solid Films , vol.206 , pp. 198
- McKenzie, D.R.¹ Muller, D.A.² Kravtchinskaia, E.³ Segal, D.⁴ Cockayne, D.J.H.⁵ Amaratunga, G.⁶ Silva, R.⁷

3
- 0027664117
- F. Xiong, Y.Y. Wang, V. Leppert and R.P.H. Chang, J. Mater. Res., 8 (1993) 2265.
- (1993) J. Mater. Res. , vol.8 , pp. 2265
- Xiong, F.¹ Wang, Y.Y.² Leppert, V.³ Chang, R.P.H.⁴

4
- 36448999703
- R. Lossy, D.L. Pappas, R.A. Roy, J.J. Cuomo and V.M. Sura, Appl. Phys. Lett., 61 (1992) 171.
- (1992) Appl. Phys. Lett. , vol.61 , pp. 171
- Lossy, R.¹ Pappas, D.L.² Roy, R.A.³ Cuomo, J.J.⁴ Sura, V.M.⁵

5
- 1542359736
- Y. Lifshitz, G.D. Lempert and E. Grossman, Phys. Rev. Lett., 72 (1994) 2753.
- (1994) Phys. Rev. Lett. , vol.72 , pp. 2753
- Lifshitz, Y.¹ Lempert, G.D.² Grossman, E.³

6
- 0001365317
- V. Paillard, P. Melinon, V. Dupuis, A. Perez, J.P. Perez, G. Guiraud and J. Formazero, Phys. Rev., B49 (1994) 11433.
- (1994) Phys. Rev. , vol.B49 , pp. 11433
- Paillard, V.¹ Melinon, P.² Dupuis, V.³ Perez, A.⁴ Perez, J.P.⁵ Guiraud, G.⁶ Formazero, J.⁷

7
- 0001336127
- S. Logothetidis, Appl. Phys. Lett. 69 (1996) 158.
- (1996) Appl. Phys. Lett. , vol.69 , pp. 158
- Logothetidis, S.¹

8
- 0003808259
- North-Holland, Amsterdam
- R.M.A. Azzam and N. Bashara, Ellipsometry and Polarized Light, North-Holland, Amsterdam, 1977.
- (1977) Ellipsometry and Polarized Light
- Azzam, R.M.A.¹ Bashara, N.²

9
- 0029734330
- S. Logothetidis, J. Petalas and S. Ves, J. Appl. Phys., 79 (1996) 1040.
- (1996) J. Appl. Phys. , vol.79 , pp. 1040
- Logothetidis, S.¹ Petalas, J.² Ves, S.³

10
- 0001575817
- F. Xiong, Y.Y. Wang and R.P.H. Chang, Phys. Rev., B48 (1993) 8016.
- (1993) Phys. Rev. , vol.B48 , pp. 8016
- Xiong, F.¹ Wang, Y.Y.² Chang, R.P.H.³

11
- 0019539913
- D.E. Aspnes, Thin Solid Films, 89 (1982) 249.
- (1982) Thin Solid Films , vol.89 , pp. 249
- Aspnes, D.E.¹

12
- 2142845170
- R.J. Nemanich, J.T. Glass, G. Lucovsky and R.E. Shroder, J. Vac. Sci. Technol., A6 (1988) 1783.
- (1988) J. Vac. Sci. Technol. , vol.A6 , pp. 1783
- Nemanich, R.J.¹ Glass, J.T.² Lucovsky, G.³ Shroder, R.E.⁴

13
- 36849097152
- R.J. Jaccodine and W.A. Schlegel, J. Appl. Phys., 37 (1966) 2429.
- (1966) J. Appl. Phys. , vol.37 , pp. 2429
- Jaccodine, R.J.¹ Schlegel, W.A.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.