Finite-element modeling of nanoindentation for evaluating mechanical properties of MEMS materials

Surface and Coatings Technology

Volumn 103-104, Issue , 1998, Pages 268-275

  Knapp, J A ^a   Follstaedt, D M ^a   Myers, S M ^a   Barbour, J C ^a   Friedmann, T A ^a   Ager III, J W ^b   Monteiro, O R ^b   Brown, I G ^b  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

Mechanical properties; MEM; Modeling; Nanoindentation

Indexed keywords

CARBON; ELASTIC MODULI; HARDNESS; ION IMPLANTATION; MICROELECTROMECHANICAL DEVICES; NICKEL; SUBSTRATES; THIN FILMS; TITANIUM; TRIBOLOGY; WEAR OF MATERIALS; YIELD STRESS;

DIAMOND LIKE CARBON; NANOINDENTATION;

FINITE ELEMENT METHOD;

EID: 0032065022     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(98)00422-8     Document Type: Article

References (18)

1. J.A. Knapp, D.M. Follstaedt, S.M. Myers, J. Appl. Phys. 79 (1996) 1116.
2. J.A. Knapp, D.M. Follstaedt, Mater. Res. Soc. Symp. Proc. 397 (1996) 387.
3. J.A. Knapp, D.M. Follstaedt, J.C. Barbour, S.M. Myers, Nucl. Instrum. Meth. B 127-128 (1997) 935.
4. J.A. Knapp, D.M. Follstaedt, J.C. Barbour, S.M. Myers, J.W. Ager, O.R. Monteiro, I.G. Brown, Mater. Res. Soc. Symp. Proc. 438 (1997) 617.
5. S.M. Myers, D.M. Follstaedt, J.A. Knapp, T.A. Christenson, Mater. Res. Soc. Symp. Proc. 444 (1997) 99.
6. S.M. Myers, J.A. Knapp, D.M. Follstaedt, M.T. Dugger, J. Appl. Phys. 83 (1998) 1256.
7. D.M. Follstaedt, S.M. Myers, J.A. Knapp, M.T. Dugger, T.A. Christenson, Surf. Coat. Technol. this issue.
8. S.M. Myers, J.A. Knapp, D.M. Follstaedt, M.T. Dugger, T.A. Christenson, Surf. Coat. Technol. this issue.
9. T.A. Friedmann, J.P. Sullivan, J.A. Knapp, D.R. Tallant, D.M. Follstaedt, D.L. Medlin, P.B. Mirkarimi, Appl. Phys. Lett. 71 (1997) 3820.
10. W.C. Oliver, G.M. Pharr, J. Mater. Res. 7 (1992) 1564.
11. F.A. McClintock, A.S. Argon (Eds.), Mechanical Behavior of Materials, Addison-Wesley, Reading, MA, 1966, pp. 276-279.
12. D.M. Follstaedt, F.G. Yost, L.E. Pope, S.T. Picraux, J.A. Knapp, Appl. Phys. Lett. 43 (1983) 358.
13. D.M. Follstaedt, F.G. Yost, L.E. Pope, Mat. Res. Soc. Symp. Proc. 27 (1984) 655.
14. D.M. Follstaedt, J.A. Knapp, L.E. Pope, F.G. Yost, S.T. Picraux, Appl. Phys. Lett. 45 (1984) 358.
15. I.N. Sneddon, Int. J. Eng. Sci. 3 (1965) 47.
16. J.W. Harding, I.N. Sneddon, Proc. Phys. Soc. Lond. 78 (1961) 169.
17. G.M. Pharr, W.C. Oliver, F.R. Brotzen, J. Mater. Res. 7 (1992) 613.
18. R.B. King, Int. J. Solids Struct. 23 (1987) 1657.