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Volumn 100-101, Issue 1-3, 1998, Pages 486-490

Studies with nondestructive techniques of the composition, initial stages of growth and surface topography of thin amorphous carbon films

(3) Logothetidis, S a Stergioudis, G a Vouroutzis, N a

a ARISTOTLE UNIVERSITY OF THESSALONIKI (Greece)

Author keywords

Amorphous Carbon; Atomic force; Growth; Microscopy; Spectroscopic ellipsometry; X ray reflectometry

Indexed keywords

ATOMIC FORCE MICROSCOPY; CARBON; ELLIPSOMETRY; FILM GROWTH; MAGNETRON SPUTTERING; MORPHOLOGY; NONDESTRUCTIVE EXAMINATION; SPECTROSCOPIC ANALYSIS; SPUTTER DEPOSITION; SURFACE ROUGHNESS; THIN FILMS; X RAY ANALYSIS;

SPECTROSCOPIC ELLIPSOMETRY (SE); SURFACE TOPOGRAPHY; X RAY REFLECTOMETRY;

AMORPHOUS FILMS;

EID: 0032024221 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(97)00676-2 Document Type: Article

Times cited : (8)

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