Micromachined membrane filters for microwave and millimeter-wave applications (invited article)

International Journal of Microwave and Millimeter-Wave Computer-Aided Engineering

Volumn 7, Issue 2, 1997, Pages 149-166

  Rebeiz, Gabriel M ^a   Katehi, Linda P B ^b   Weller, Thomas M ^c   Chi, Chen Yu ^a   Robertson, Stephen V ^b  

^a UNIVERSITY OF MICHIGAN   (United States)

^b UNIVERSITY OF SOUTH FLORIDA   (United States)

^c HEWLETT PACKARD COMPANY   (United States)

Author keywords

Filters; Micromachining; Microwave and millimeter wave technology; Resonators

Indexed keywords

BANDPASS FILTERS; DIELECTRIC FILMS; DIODES; ELECTROMAGNETIC DISPERSION; ELECTROMAGNETIC WAVE TRANSMISSION; INTEGRATED CIRCUIT MANUFACTURE; LOW PASS FILTERS; MICROMACHINING; MILLIMETER WAVE DEVICES; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTING SILICON; TRANSISTORS;

MICROMACHINED MEMBRANE FILTERS; TRANSVERSE ELECTROMAGNETIC (TEM) PROPAGATION MODE;

MICROWAVE FILTERS;

EID: 0031104533     PISSN: 10501827     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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