Planar millimeter-wave antennas using SiNj;-membranes on GaAs

IEEE Transactions on Microwave Theory and Techniques

Volumn 44, Issue 9, 1996, Pages 1593-1595

  Stotz, M ^a   Gottwald, G ^b   Haspeklo, H ^b   Wenger, J ^a  

^a DAIMLER AG   (Germany)

^b DARMSTADT UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ANECHOIC CHAMBERS; CHEMICAL VAPOR DEPOSITION; DIELECTRIC MATERIALS; ESTIMATION; FABRICATION; MICROSTRIP LINES; MICROWAVE MEASUREMENT; MILLIMETER WAVES; MONOLITHIC MICROWAVE INTEGRATED CIRCUITS; SEMICONDUCTING GALLIUM ARSENIDE; SILICON NITRIDE; SUBSTRATES;

ANTENNA PATCHES; MICROWAVE DESIGN SYSTEM; PLANAR APERTURE COUPLED ANTENNAS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

MICROSTRIP ANTENNAS;

EID: 0030247767     PISSN: 00189480     EISSN: None     Source Type: Journal    
DOI: 10.1109/22.536611     Document Type: Article

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