Analysis of native oxide films and oxide-substrate reactions on III-V semiconductors using thermochemical phase diagrams

Thin Solid Films

Volumn 103, Issue 1-3, 1983, Pages 3-16

  Schwartz, G P ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

OXYGEN;

OXIDE FILMS;

SEMICONDUCTOR DEVICES;

EID: 0020750368     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/0040-6090(83)90420-0     Document Type: Article

References (29)

1. Discussion of “GaAs Oxidation and the Ga-As-O Equilibrium Phase Diagram” [C. D. Thurmond, G. P. Schwartz, G. W. Kammlott, and B. Schwartz (pp. 1366–1371, Vol. 127, No. 6)]
2. The Oxidation of GaP and GaAs
3. Raman Scattering Study on Unoxidized Antimony in Anodic Oxide-Films of InSb