Piezoelectric and capacitative microactuators and devices

Materials Research Society Symposium - Proceedings

Volumn 310, Issue , 1993, Pages 37-46

  Sayer, M ^a   Barrow, D ^a   Zou, L ^a   Vasant Kumar, C V R ^a   Noteboom, R ^a   Knapik, D A ^a   Schindel, D W ^a   Hutchins, D A ^a  

^a QUEEN S UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; PERFORMANCE; PIEZOELECTRIC TRANSDUCERS; SEMICONDUCTING SILICON; SENSORS;

ACOUSTIC RESONATORS; MICROACTUATORS; PZT FILMS; SILICON SUBSTRATES;

PIEZOELECTRIC DEVICES;

EID: 0027887885     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-310-37     Document Type: Conference Paper

References (17)