SCOPUS 정보 검색 플랫폼

Sensors and Actuators: A. Physical

Volumn 45, Issue 2, 1994, Pages 125-129

Characterization of piezoelectric properties of PZT thin films deposited on Si by ECR sputtering

(5) Toyama, M a Kubo, R a Takata, E a Tanaka, K a Ohwada, K a

a MURATA MANUFACTURING CO LTD (Japan)

Author keywords

Electron cyclotron resonance; Lead zirconate titanate; Piezoelectric properties; Silicon

Indexed keywords

CERAMIC MATERIALS; ELECTRON CYCLOTRON RESONANCE; LEAD COMPOUNDS; PIEZOELECTRICITY; SILICON WAFERS; SPUTTER DEPOSITION; SUBSTRATES; TARGETS; THIN FILMS;

LEAD ZIRCONATE TITANATE;

FERROELECTRIC MATERIALS;

EID: 0028545960 PISSN: 09244247 EISSN: None Source Type: Journal
DOI: 10.1016/0924-4247(94)00828-0 Document Type: Article

Times cited : (39)

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