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Volumn 4, Issue 4, 1993, Pages 218-224
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Development of a force sensor for atomic force microscopy using piezoelectric thin films
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Author keywords
[No Author keywords available]
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
CANTILEVERED MICROBEAMS;
FORCE SENSORS;
LEAD ZIRCONATE TITANATE THIN FILMS;
NONCONTACT ATOMIC FORCE MICROSCOPES;
ZINC OXIDE THIN FILMS;
AMPLITUDE MODULATION;
ELECTRIC IMPEDANCE MEASUREMENT;
FABRICATION;
FORCE MEASUREMENT;
MICROSCOPIC EXAMINATION;
NONDESTRUCTIVE EXAMINATION;
PIEZOELECTRIC DEVICES;
PIEZOELECTRICITY;
RESONANCE;
SURFACE MEASUREMENT;
THIN FILM DEVICES;
VIBRATIONS (MECHANICAL);
SENSORS;
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EID: 0027679006
PISSN: 09574484
EISSN: None
Source Type: Journal
DOI: 10.1088/0957-4484/4/4/007 Document Type: Article |
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Times cited : (109)
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References (21)
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