Microfabrication of cantilever styli for the atomic force microscope

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 8, Issue 4, 1990, Pages 3386-3396

  Albrecht, T R ^a   Akamine, S ^a   Carver, T E ^a   Quate, C F ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPIC ETCHING; CHEMICAL VAPOR DEPOSITION; ETCHING; FABRICATION; LUNAR SURFACE ANALYSIS; MICROANALYSIS; MICROFABRICATION; NANOCANTILEVERS; OPTICAL RESOLVING POWER; PLASMA ETCHING; PROBES; SCANNING TUNNELING MICROSCOPY; SILICON; SILICON WAFERS; SPRINGS (COMPONENTS); SURFACE ANALYSIS; SURFACE STRUCTURE; SURFACE TOPOGRAPHY; TUNGSTEN;

ANISOTROPIC PLASMA ETCHING; FABRICATION PROCESS; HIGH-RESOLUTION MICROSCOPY; INSULATING SURFACES; MECHANICAL RESONANCE FREQUENCY; MICRO-FABRICATION TECHNIQUES; MICROFABRICATION PROCESS; SURFACE FORCES;

ATOMIC FORCE MICROSCOPY;

EID: 77952760920     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.576520     Document Type: Article

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