Application of lead zirconate titanate thin film displacement sensors for the atomic force microscope

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 13, Issue 3, 1995, Pages 1119-1122

  Fujii, Toru ^a   Watanabe, Shunji ^a   Suzuki, Masatoshi ^a   Fujiu, Takamitsu ^a  

^a NIKON CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; COMPACT DISKS; FABRICATION; IMAGE PROCESSING; LEAD COMPOUNDS; OSCILLATIONS; PERFORMANCE; PIEZOELECTRIC MATERIALS; PROXIMITY SENSORS; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICES; THIN FILMS;

CANTILEVER; DISPLACEMENT SENSORS; LEAD ZIRCONATE TITANATE THIN FILMS; MICROFABRICATION PROCESS;

ATOMIC FORCE MICROSCOPY;

EID: 1842698276     PISSN: 0734211X     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.587914     Document Type: Article

References (13)