Micromachines on the march

IEEE Spectrum

Volumn 31, Issue 5, 1994, Pages 20-31

  Bryzek, Janusz ^a   Petersen, Kurt ^a   McCulley, Wendell ^a  

^a Lucas Nova Sensor ^*

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ETCHING; MICROMACHINING; PIEZOELECTRIC TRANSDUCERS; PRESSURE TRANSDUCERS; SIGNAL PROCESSING; SILICON SENSORS;

BULK MICROMACHINING; SMART TRANSDUCERS;

MICROELECTROMECHANICAL DEVICES;

EID: 0028427270     PISSN: 00189235     EISSN: None     Source Type: Journal    
DOI: 10.1109/6.278394     Document Type: Article

References (0)