Design of linear-motion microactuators using piezoelectric thin films

Journal of Micromechanics and Microengineering

Volumn 1, Issue 4, 1991, Pages 247-252

  Robbins, W P ^a   Polla, D L ^a   Tamagawa, T ^a   Glumac, D E ^a   Tjhen, W ^a  

^a UNIVERSITY OF MINNESOTA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROACTUATORS;

ELECTROMECHANICAL DEVICES - MICROELECTROMECHANICAL; PIEZOELECTRIC DEVICES; PIEZOELECTRIC MATERIALS;

ACTUATORS;

EID: 0026395799     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/1/4/006     Document Type: Article

References (9)