Piezoelectric sensor for detecting force gradients in atomic force microscopy

Japanese Journal of Applied Physics

Volumn 33, Issue 1R, 1994, Pages 334-

  Itoh, Toshihiro ^a   Suga, Tadatomo ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC SPECTROSCOPY; ZINC OXIDE;

FORCE GRADIENT; MICROBEAMS; PIEZOELECTRIC FILMS;

PIEZOELECTRIC TRANSDUCERS;

EID: 0028336158     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.33.334     Document Type: Article

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