Piezoelectric micromotors for microrobots

Journal of Microelectromechanical Systems

Volumn 1, Issue 1, 1992, Pages 44-51

  Flynn, Anita M ^a   Ehrlich, Daniel J ^a,b,c,d   Brooks, Rodney A ^b   Cross, L Eric ^e   Tavrow, Lee S ^f   Bart, Stephen F ^f   Udayakumar, K R ^f  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^b MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^c SUN MICROSYSTEMS   (United States)

^d Pennsylvania State University ^*  (United States)

^e PENNSYLVANIA STATE UNIVERSITY   (United States)

^f NONE

Author keywords

[No Author keywords available]

Indexed keywords

MOTORS; PIEZOELECTRIC DEVICES; ROBOTS - COMPONENTS; ULTRASONIC DEVICES;

MICROMOTORS; MICROROBOTS; PIZOELECTRIC ULTRASONIC MOTORS;

ELECTROMECHANICAL DEVICES;

EID: 0026839737     PISSN: 10577157     EISSN: 19410158     Source Type: Journal    
DOI: 10.1109/84.128055     Document Type: Article

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