Piezoelectric force sensor for scanning force microscopy

Sensors and Actuators: A. Physical

Volumn 43, Issue 1-3, 1994, Pages 305-310

  Itoh, T ^a   Suga, T ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

MICROSCOPIC EXAMINATION; PIEZOELECTRIC TRANSDUCERS; SENSORS; SILICA; THIN FILMS;

FORCE SENSORS; SCANNING FORCE MICROSCOPY;

FORCE MEASUREMENT;

EID: 0028426819     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/0924-4247(93)00665-Q     Document Type: Article

References (21)

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16. Piezoelectric force sensor for atomic force microscopy