Micromirrors and micromirror arrays for scanning applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4178, Issue , 2000, Pages 338-347

  Gessner, Thomas ^a   Kurth, Steffen ^a   Kaufmann, Christian ^a   Markert, Joachim ^a   Ehrlich, Andreas ^b   Doëtzel, Wolfram ^a  

^a CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

^b Erwin Sick Engineering GmbH   (Germany)

Author keywords

Dust monitoring; Laser projection; Micromirror; Spectrometer

Indexed keywords

MONOCRYSTALLINE SILICON;

CONTINUOUS SCANNING; ENVIRONMENTAL MONITORING; IMAGE PROJECTION; MICRO MIRROR; MICRO-SCANNING; MICROMIRROR ARRAY; WORKING FREQUENCY;

SCANNING;

EID: 0010097745     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.396505     Document Type: Conference Paper

References (20)

1. L. Fan, M. C. Wu, K. D. Choquette, M. H. Crawford, Self-Assembled Microactuated XYZ stage for optical scanning and alignment", Dig. of Techn. Papers of 1997 International Conference on Solid-State Sensors and Actuators, Chicago, IL, 1997, Vol. 1, pp. 319-322.
2. G. Vdovin, P. M. Sano, S. Middelhoek, Technology and application of micromachined adaptive mirrors", Proc. of MME '98, June 3-5, 1998, Hardanger, Norway, pp. 16-27.
3. M-H. Kiang, J. T. Nee, K. Y. Lau, R. S. Muller, Surface-micromachined diffraction gratings for scanning spectroscopic applications", Dig. Of Techn. Papers of 1997 International Conference on Solid-State Sensors and Actuators, Chicago, IL, 1997, Vol. 1, pp. 343-345.
4. L. J. Hornbeck,, Digital Light Processing for High-Brightness, High-Resolution Applications", Electronic Imaging, El '97, San Jose, California, Febr. 1997.
5. H. Lakner, W. Doleschal, P. Duerr, A. Gehner, H. Schenk, A. Wolter, G. Zimmer Micromirrors for direct writing systems and scanners', Proc. of SPIE Vol. 3878, 1999, pp. 217-227.
6. D. M. Burns, V. M. Bright, Micro-electro-mechanical variable blaze gratings", MEMS '97, IEEE 10th Int. Workshop on Micro Electro Mechanical Systems, pp. 55-60.
7. K. Reimer, R. Engelke, M. Witt, B. Wagner, 16 k Infrared micromirror array with large beam deflection and tenth millimeter pixel size", Proc. of SPIE Vol. 3878, (1999), pp. 271-280.
8. Conant, P. H. Hagelin, U. Krishnamoorthy, 0. Solgaard, K. Y. Lau, R. S. Muller, A raster-scanning full-motion video display using polysilicon micromachined minors", Transducers '99, Sendai, Japan, June 1999.
9. F. Pan, J. Kubby, E. Peeters, A. Tran, S. Mukherjee, Squeeze film damping effect on the dynamic response of a MEMS torsion mirror", J. Micromech. Microeng. 8 (1998) pp. 200-208.
10. Kurth, R. Hahn, C. Kaufmann, K. Kehr, J. Mehner, U. Wollmann, W. Doetzel, J. Gessner, Silicon mirrors and micromirror arrays for spatial laser beam modulation", Sensors and Actuators A 66 (1998) pp. 76-8211.
11. Y. H. Mm, Y. K. Kim, Modeling, design, fabrication and measurement of a single lyaer polysilicon micromirror with initial curvature compensation", Sensors and Actuators 78 (1999) pp. 8-17.
12. Gessner, W. Dötzel, D. Billep, R. Hahn, C. Kaufmann, S. Kurth, K. Kehr, C. Steiniger, U. Wollmann, Silicon mirror arrays fabricated by using bulk- A nd surface-micromachining", SPIE Proc. Vol. 3008 (1997), 256-305.
13. Kurth, K. Kehr, J. Mehner, C. Kaufmann, R. Hahn, R. Seidel, W. Doetzel, T. Gessner, Synchronously working micromirrors for beam steering-design and application aspects", Proc. of SPIE 3787, pp. 63-73.
14. Riesenberg, U. Dillner, HADAMARD imaging spectrometer with micro slit matrix", Proc. of SPIE Vol. 3752.
15. Kehr, S. Kurth, J. Mehner, C. Kaufmann, R. Hahn, W. Doetzel, T. Gessner, Analogously working micromirror arrays", Proc. of SPIE Vol. 3878, pp. 80-89.
16. J.-W. Shin, S.-W. Chung, Y.-K. Kim, B. K. Choi, Design and fabrication of micromirror array supported by vertical springs", Sensors and Actuators A 66 (1998), pp. 144-149.
17. S.-G. Kim, K-H. Hwang, Thin-film micromirror array for information display system", Proc. of EuroDisplay '99, Berlin, Sept. 8, 1999.
18. Yamada, T. Kuriyama, A novel asymmetric silicon micro-mirror for optical beam scanning display", Proc. of 11th Annual mt. Workshop on MEMS, Heidelberg, Germany, 1998, pp. 110-115.
19. Ikeda, H. Goto, H. Totani, M. Sakata, T. Yada, Two-Dimensional Miniature Optical-Scanning Sensor with Silicon Micromashined Scanning Mirror", Proc. SPIE 3008, pp. 111-122.
20. Vangbo, S. Karisson, Y. Bäcklund, Low cost micromachined mirrors for display systems", J. Micromech. Microeng. 9 (1999) pp. 85-88.