Silicon mirror arrays fabricated by using bulk- and surface-micromachining

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3008, Issue , 1997, Pages 296-305

  Gessner, Thomas ^a   Dötzel, Wolfram ^a   Billep, Detlef ^a   Hahn, Ramon ^a   Kaufmann, Christian ^a   Kehr, Kersten ^a   Kurth, Steffen ^a   Steiniger, Carmen ^a   Wollmann, Udo ^a  

^a CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Actuator array; Electrostatic operation; Micro mirror; Silicon surface micromachining

Indexed keywords

ACTUATORS; BONDING; COMPUTER SIMULATION; DAMPING; DRY ETCHING; ELECTRODES; ELECTROSTATICS; FINITE ELEMENT METHOD; FREQUENCIES; METALLIZING; MICROMACHINING; MIRRORS; REFRACTORY MATERIALS; SILICON WAFERS; SURFACE PHENOMENA; TRANSFER FUNCTIONS;

MICRO MIRROR ARRAYS;

ARRAYS;

EID: 0031389869     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.271427     Document Type: Conference Paper

References (11)

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