Two-dimensional miniature optical-scanning sensor with silicon micromachined scanning mirror

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3008, Issue , 1997, Pages 111-122

  Ikeda, Masaaki ^a   Goto, Hiroshi ^a   Totani, Hiromi ^a   Sakata, Minoru ^a   Yada, Tuneji ^a  

^a OMRON CORPORATION   (Japan)

Author keywords

Integration; Micromachining; Optical sensor; Photodiode; Piezoelectric actuator; Piezoresistor; Scanner; Silicon; Two dim ensional

Indexed keywords

CHARGE COUPLED DEVICES; LIGHT REFLECTION; MICROMACHINING; MICROOPTICS; MIRRORS; OPTICAL CHARACTER RECOGNITION; PHOTODETECTORS; PHOTODIODES; SCANNING; SENSITIVITY ANALYSIS; SILICON;

OPTICAL-SCANNING SENSORS; SILICON MICROMACHINED SCANNING MIRRORS;

OPTICAL SENSORS;

EID: 0031370684     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.271406     Document Type: Conference Paper

References (6)

1. Super compact dual axis optical scanning unit applying a torsional spring resonator driven by a piezoelectric actuator
2. High performance micro photonic devices with micro actuators
3. Two dimensional silicon micromachined optical scanner integrated with photo detector
4. Two dimensional silicon micromachined optical scanner integrated with photo detector and piezoresistor
5. Piezoresistor effect of silicon
6. Graphical representation of the piezoresistance coefficient in silicon-shear coefficient in plane