Analogously working micromirror arrays

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3878, Issue , 1999, Pages 80-89

  Kehr, Kersten ^a   Kurth, Steffen ^a   Mehner, Jan ^a   Kaufmann, Christian ^a   Hahn, Ramon ^a   Doetzel, Wolfram ^a   Gessner, Thomas ^a  

^a CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CASCADE CONNECTIONS; COMPOSITE MICROMECHANICS; LIGHT MODULATION; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MIRRORS; OPTICAL BEAM SPLITTERS; OPTICAL PROPERTIES; SEMICONDUCTING SILICON;

CASCADE ELEMENTS; ELECTROMECHANICAL SYSTEM; HIGH FREQUENCY APPLICATIONS; MICROMIRROR ARRAYS; MONOCRYSTALLINE SILICON;

MICROOPTICS;

EID: 0033338606     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)