Low cost micromachined mirrors for display systems

Journal of Micromechanics and Microengineering

Volumn 9, Issue 1, 1999, Pages 85-88

  Vangbo, Mattias ^a   Karlsson, Staffan ^a   Bäcklund, Ylva ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

COST EFFECTIVENESS; DISPLAY DEVICES; FABRICATION; MICROMACHINING; OPTICAL DESIGN; PIEZOELECTRIC DEVICES;

HEAD MOUNTED DISPLAY SYSTEM; LOW COST RESONANT SCANNING MIRRORS; MICROSTRUCTURE TECHNOLOGY;

MIRRORS;

EID: 0033100795     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/9/1/311     Document Type: Article

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