Micromirrors for direct writing systems and scanners

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3878, Issue , 1999, Pages 217-227

  Lakner, Hubert ^a   Doleschal, Wolfgang ^a   Duerr, Peter ^a   Gehner, Andreas ^a   Schenk, Harald ^a   Wolter, Alexander ^a   Zimmer, Guenter ^a  

^a FRAUNHOFER INSTITUTE FOR MICROELECTRONIC CIRCUITS AND SYSTEMS   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; DIFFRACTION; DIFFRACTION GRATINGS; LIGHT MODULATION; LIGHT MODULATORS; LITHOGRAPHY; MICROOPTICS; SCANNING;

CANTILEVER BEAM MIRROR; INCIDENT LIGHT; MICROMIRRORS; MICROSCANNER MIRROR; MOVING LIQUID MIRROR; PHASE GRATINGS; PIXEL ELECTRODES; SILICON MICROMECHANICAL TORSIONAL ACTUATOR; VISCOELASTIC CONTROL LAYER;

MIRRORS;

EID: 0033342936     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)