Synchronously working micromirrors for beam steering - design and application aspects

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3787, Issue , 1999, Pages 63-73

  Kurth, Steffen ^a   Kehr, Kersten ^a   Mehner, Jan ^a   Kaufmann, Christian ^a   Hahn, Ramon ^a   Seidel, Ralf ^a   Doetzel, Wolfram ^a   Gessner, Thomas ^a  

^a CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION GRATINGS; INFRARED IMAGING; LASER BEAMS; MICROOPTICS; OPTICAL RESOLVING POWER; PROJECTION SYSTEMS;

BEAM STEERING DESIGN; BLAZED GRATING; LASER PROJECTION; OPTICAL POWER RATING; SYNCHRONOUSLY WORKING MIRRORS; TOPOGRAPHIC METROLOGY;

MIRRORS;

EID: 0033360028     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)