Origin and evolution of sculptured thin films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 18, Issue 4 II, 2000, Pages 1538-1545

  Messier, Russell ^a   Venugopal, Vijayakumar C ^b   Sunal, Paul D ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

^b The Pennsylvania State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; ION BOMBARDMENT; MATHEMATICAL MODELS; MORPHOLOGY; THIN FILMS;

SCULPTURED THIN FILMS;

SEMICONDUCTING FILMS;

EID: 0001758514     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.582381     Document Type: Article

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