Incremental-growth model for the deposition of spatially modulated thin film nanostructures

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 5, 1998, Pages 2811-2816

  Hodgkinson, Ian ^a   Wu, Qi Hong ^a   McPhun, Adrian ^a  

^a UNIVERSITY OF OTAGO   (New Zealand)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001277726     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590276     Document Type: Article

References (13)

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