Evolution of sculptured thin films

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3790, Issue , 1999, Pages 133-141

  Messier, Russell ^a   Sunal, Paul ^a   Venugopal, Vijayakumar ^a  

^a Materials Research Lab   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; ATOMS; DEPOSITION; FILM GROWTH; ION BOMBARDMENT; MATHEMATICAL MODELS; MORPHOLOGY; SUBSTRATES; SURFACES; VAPORS;

ATOMIC SELF SHADOWING EFFECTS; COLUMN SIZES; SCULPTURED THIN FILMS; THIN FILM HELICOIDAL BIANISOTROPIC MEDIUMS; VAPOR INCIDENCE ANGLE;

THIN FILMS;

EID: 0033362755     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (22)