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Volumn 18, Issue 1, 2000, Pages 32-36

Low-permittivity nanocomposite materials using sculptured thin film technology

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION; ANISOTROPY; MICROELECTRONICS; PERMITTIVITY; POROUS MATERIALS; SURFACE TREATMENT; THIN FILMS;

EID: 0033713514     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.591146     Document Type: Article
Times cited : (22)

References (26)
  • 15
    • 0343436480 scopus 로고    scopus 로고
    • edited by A. Lakhtakia and R. Messier, Proc. SPIE
    • Engineered Nanostructural Films and Materials, edited by A. Lakhtakia and R. Messier, Proc. SPIE 3790 (1999).
    • (1999) Engineered Nanostructural Films and Materials , vol.3790


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.