Low-permittivity nanocomposite materials using sculptured thin film technology

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 18, Issue 1, 2000, Pages 32-36

  Venugopal, Vijayakumar C ^a   Lakhtakia, Akhlesh ^a   Messier, Russell ^a   Kucera, John Paul ^b  

^a The Pennsylvania State University   (United States)

^b PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION; ANISOTROPY; MICROELECTRONICS; PERMITTIVITY; POROUS MATERIALS; SURFACE TREATMENT; THIN FILMS;

BRUGGEMAN FORMALISM; LOW-PERMITTIVITY COLUMNAR THIN FILMS (LPCTF);

NANOSTRUCTURED MATERIALS;

EID: 0033713514     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.591146     Document Type: Article

References (26)

1. W. W. Lee and P. S. Ho, MRS Bull. 22, 19 (1997).
2. R. H. Havemann et al. Mater. Res. Soc. Symp. Proc. 511, 3 (1998).
3. The National Technological Roadmap for Semiconductors (Semiconductor Industry Association, San Jose, CA, 1994).
4. R. S. List, A. Singh, A. Ralston, and G. Dixit, MRS Bull. 22, 61 (1997).
5. K. Endo, T. Tatsumi, Y. Matsubara, and T. Horiuchi, Jpn. J. Appl. Phys., Part 1 37, 1809 (1998).
6. A. Grill, V. Patel, and C. Jahnes, J. Electrochem. Soc. 145, 1649 (1998).
7. B. Shieh, K. Saraswat, J. P. McVittie, S. List, R. Nag, M. Islamraja, and R. H. Havemann, IEEE Electron Device Lett. 19, 16 (1998).
8. T. Homma, Mater. Sci. Eng., R. 23, 243 (1998).
9. L. W. Hrubesh, Mater. Res. Soc. Symp. Proc. 381, 267 (1995).
10. T. Ramos et al. Mater. Res. Soc. Symp. Proc. 511, 105 (1998).
11. S. V. Nitta, V. Pisupatti, A. Jain, P. C. Wayner, Jr., W. N. Gill, and J. L. Plawsky, J. Vac. Sci. Technol. B 17, 205 (1999).
12. G. W. Ray, Mater. Res. Soc. Symp. Proc. 511, 199 (1998).
13. A. Lakhtakia and R. Messier, Mater. Res. Innovations 1, 145 (1997).
14. R. Messier and A. Lakhtakia, Mater. Res. Innovations 2, 217 (1999).
15. Engineered Nanostructural Films and Materials, edited by A. Lakhtakia and R. Messier, Proc. SPIE 3790 (1999).
16. K. Robbie and M. J. Brett, J. Vac. Sci. Technol. A 15, 1460 (1997).
17. M. C. Nobrega, L. C. F. Gomes, G. P. LaTorre, and J. K. West, Mater. Charact. 40, 1 (1998).
18. A. Lakhtakia, Microwave Opt. Technol. Lett. 21, 286 (1999).
19. H. C. Chen, Theory of Electromagnetic Waves (McGraw-Hill, New York, 1983).
20. A. Lakhtakia, B. Michel, and W. S. Weiglhofer, Compos. Sci. Technol. 57, 185 (1997).
21. A. Lakhtakia and G. W. Mulholland, J. Res. Natl. Inst. Stand. Technol. 98, 699 (1993).
22. W. S. Weiglhofer and A. Lakhtakia, Int. J. Infrared Millim. Waves 17, 1365 (1996).
23. A. Lakhtakia, B. Michel, and W. S. Weiglhofer, J. Phys. D: Appl. Phys. 30, 230 (1997).
24. S. D. Conte and C. de Boor, Elementary Numerical Analysis, An Algorithmic Approach (McGraw-Hill, New York, 1972).
25. A. Lakhtakia, B. Michel, and W. S. Weiglhofer, Arch. Elektr. Uebertrag. 51, 231 (1997).
26. M. J. Brett, J. C. Sit, M. Seto, D. Vick, and K. Robbie, Proc. SPIE 3790, 114 (1999).