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Volumn 18, Issue 1, 2000, Pages 32-36
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Low-permittivity nanocomposite materials using sculptured thin film technology
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Author keywords
[No Author keywords available]
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Indexed keywords
ADSORPTION;
ANISOTROPY;
MICROELECTRONICS;
PERMITTIVITY;
POROUS MATERIALS;
SURFACE TREATMENT;
THIN FILMS;
BRUGGEMAN FORMALISM;
LOW-PERMITTIVITY COLUMNAR THIN FILMS (LPCTF);
NANOSTRUCTURED MATERIALS;
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EID: 0033713514
PISSN: 10711023
EISSN: None
Source Type: Journal
DOI: 10.1116/1.591146 Document Type: Article |
Times cited : (22)
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References (26)
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