Self-shadowing and surface diffusion effects in obliquely deposited thin films

Thin Solid Films

Volumn 339, Issue 1-2, 1999, Pages 88-94

  Vick, D ^a   Friedrich, L J ^a   Dew, S K ^a   Brett, M J ^a   Robbie, K ^a   Seto, M ^a   Smy, T ^b  

^a UNIVERSITY OF ALBERTA   (Canada)

^b CARLETON UNIVERSITY   (Canada)

Author keywords

Computer simulation; Deposition process; Evaporation; Physical vapour deposition

Indexed keywords

COMPUTER SIMULATION; COMPUTER SOFTWARE; DIFFUSION IN SOLIDS; EVAPORATION; MORPHOLOGY; POROUS MATERIALS; TEMPERATURE CONTROL; THIN FILMS; VAPOR DEPOSITION;

PHYSICAL VAPOR DEPOSITION; SOFTWARE PACKAGE GROFILMS;

OPTICAL FILMS;

EID: 0033534981     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(98)01154-7     Document Type: Article

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