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Journal of Applied Physics

Volumn 88, Issue 4, 2000, Pages 2138-2145

Plasma cleaning and nitridation of sapphire (α-Al2O3) surfaces: New evidence from in situ real time ellipsometry

(3) Losurdo, M a Capezzuto, P a Bruno, G a

a CNR (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001204011 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.1305926 Document Type: Article

Times cited : (40)

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