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Volumn 164, Issue 1-4, 1996, Pages 167-174
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The investigation of GaN growth on silicon and sapphire using in-situ time-of-flight low energy ion scattering and RHEED
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Author keywords
[No Author keywords available]
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Indexed keywords
ANNEALING;
CRYSTAL STRUCTURE;
DESORPTION;
ELECTRON CYCLOTRON RESONANCE;
FILM GROWTH;
IMPURITIES;
MASS SPECTROMETRY;
MOLECULAR BEAM EPITAXY;
REFLECTION HIGH ENERGY ELECTRON DIFFRACTION;
SAPPHIRE;
SILICON;
SURFACE STRUCTURE;
MASS SPECTROSCOPY OF RECOILED IONS;
NITRIDATION;
TIME OF FLIGHT DIRECT RECOIL SPECTROSCOPY;
TIME OF FLIGHT LOW ENERGY ION SCATTERING;
SEMICONDUCTING GALLIUM COMPOUNDS;
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EID: 0030191981
PISSN: 00220248
EISSN: None
Source Type: Journal
DOI: 10.1016/0022-0248(96)00020-6 Document Type: Article |
Times cited : (11)
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References (16)
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