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Volumn 164, Issue 1-4, 1996, Pages 167-174

The investigation of GaN growth on silicon and sapphire using in-situ time-of-flight low energy ion scattering and RHEED

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CRYSTAL STRUCTURE; DESORPTION; ELECTRON CYCLOTRON RESONANCE; FILM GROWTH; IMPURITIES; MASS SPECTROMETRY; MOLECULAR BEAM EPITAXY; REFLECTION HIGH ENERGY ELECTRON DIFFRACTION; SAPPHIRE; SILICON; SURFACE STRUCTURE;

EID: 0030191981     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/0022-0248(96)00020-6     Document Type: Article
Times cited : (11)

References (16)
  • 5
    • 21544444614 scopus 로고
    • R.J. Molnar, R. Singh and T.D. Moustakas, J. Electron. Mater. 24 (1995) 275; R.J. Molnar and T.D. Moustakas, J. Appl. Phys. 76 (1994) 4587.
    • (1994) J. Appl. Phys. , vol.76 , pp. 4587
    • Molnar, R.J.1    Moustakas, T.D.2
  • 14
    • 30244539795 scopus 로고    scopus 로고
    • Using in-situ time-of-flight low energy ion scattering and RHEED for the surface analysis of semiconductors during annealing, nitridation and deposition, Dissertation, University of Houston, Physics Department
    • W.T. Taferner, Using in-situ time-of-flight low energy ion scattering and RHEED for the surface analysis of semiconductors during annealing, nitridation and deposition, Dissertation, University of Houston, Physics Department, 1996.
    • (1996)
    • Taferner, W.T.1
  • 15
    • 30244513963 scopus 로고    scopus 로고
    • US Patent No. 5,087,815 (11 February, 1992)
    • J.A. Schultz and H.K. Schmidt, US Patent No. 5,087,815 (11 February, 1992).
    • Schultz, J.A.1    Schmidt, H.K.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.