A review of thin-film crystalline silicon for solar cell applications. Part 2: Foreign substrates

Solar Energy Materials and Solar Cells

Volumn 68, Issue 2, 2001, Pages 173-215

  Kylie, R Catchpole ^a   Michelle, J McCann ^a   Klaus, J Weber ^a   Andrew, W Blakers ^a  

^a AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

Author keywords

Crystalline silicon; Review; Thin film

Indexed keywords

EID: 0000398235     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0927-0248(00)00246-4     Document Type: Article

References (175)

1. R.B. Bergmann, J. Köhler, R. Dassow, C. Zaczek, J.H. Werner, Phys. Stat. Sol. 166 (1998) 587.
2. A. Breymesser, V. Plunger, M. Ramasori, V. Schlosser, M. Nelhiebel, P. Schattschneider, D. Peiro C. Voz, J. Bertomeau, J. Andreu, Investigations of polycrystalline silicon Layers deposited by hot wire CVD, 2nd World Conference and Exhibition on Photovoltaic Solar Energy Conversion, Vienna, 1998.
3. G. Andra, J. Bergmann, F. Falk, E. Ose, Laser induced liquid phase crystalisation of amorphous silicon films on glass for thin film solar cells, 14th European Photovoltaic Solar Energy Conference, Barcelona, 1997.
4. P. Muller, W.M. Holber, R. Gat, W. Henrion, E. Nebauer, V. Schlosser, I. Sieber, W. Fuhs, Deposition of microcrystalline silicon onto glass by microwave plasma-enhanced sputtering, 2nd World Conference and Exhibition on Photovoltaic Solar Energy Conversion, Vienna, 1998.
5. Z. Shi, T.L. Young, G. Fu Zheng, A. Green, Sol. Energy Mater. Sol. Cells 31 (1993) 51.
6. H. Shirai, Y. Sakuma, L. Haiping, Y. Fukuda, H. Ueyama, Fast and uniform deposition of microcrystalline silicon film using high-density microwave plasma utilizing a spokewise antenna, Technical Digest of the International PVSEC-11, Sapporo, 1999.
7. M. Fukawa, S. Suzuki, L. Guo, M. Kondo, A. Matsuda, High rate growth of microcrystalline silicon using a high pressure depletion method with VHF plasma, Technical Digest of the International PVSEC-11, Sapporo, 1999.
8. R.B. Bergmann, Appl. Phys. A 69 (1999) 187.
9. R.B. Bergmann, Crystalline Si films on foreign substrates for electronic applications, Recent Research Developments in Crystal Growth Research, 1999.
10. K. Yamamoto, M. Yoshimi, T. Suzuki, Y. Tawada, Y. Okamoto, A. Nakajima, Below 5 μm thin Film poly-Si solar cell on glass substrate fabricated at low temperature, 2nd World Conference and Exhibition on Photovoltaic Solar Energy Conversion, Vienna, 1998.
11. K. Yamamoto, M. Yoshimi, T. Suzuki, Y. Okamoto, Y. Tawada, A. Nakajima, Thin film poly-silicon solar cell with "star structure" on glass substrate fabricated at low temperature, 26th Photovoltaic Solar Conference, Anaheim, 1997.
12. K. Yamamoto, T. Suzuki, M. Yoshimi, A. Nakajima, Enhancement of optical absorption for below 5 μm-thin film poly-Si solar cell with STAR structure on glass substrate, 14th European Photovoltaic Solar Energy Conference, Barcelona, 1997.
13. K. Yamamoto, T. Suzuki, M. Yoshimi, A. Nakajima, Jpn. J. Appl. Phys. P2 36 (1997) L569.
14. K. Yamamoto, M. Yoshimi, Y. Tawada, Y. Okamoto, A. Nakajima, Cost effective and high performance thin film Si solar cell towards the 21st century, Technical Digest of the International PVSEC-11, Sapporo, 1999.
15. A. Nakajima, T. Suzuki, M. Yoshimi, K. Yamamoto, Low temperature fabrication and properties of the thin film polycrystalline Si solar cell on the glass substrate, 13th European PV Solar Energy Conference, Nice, 1995.
16. K. Yamamoto, T. Suzuki, M. Yoshimi, A. Nakajima, Low temperature fabrication of thin film polycrystalline Si solar cell on the glass substrate and its application to the a-Si:H polycrystalline Si tandem solar cell, 25th Photovoltaic Solar Conference, Washington, 1996.
17. J. Meier, H. Keppner, S. Dubail, Y. Ziegler, L. Feitknecht, P. Torres, Ch. Hof, U. Kroll, D. Fischer, J. Cuperus, J.A. Anna Selvan, A. Shah, Microcrystalline and micromorph thin-film silicon solar cells, 2nd World Conference and Exhibition on Photovoltaic Solar Energy Conversion, Vienna, 1998.
18. J. Meier, E. Vallat-Sauvain, S. Dubail, U. Kroll, J. Dubail, S. Golay, L. Feitknecht, P. Torres, D. Fischer, A. Shah, microcrystalline silicon thin-film solar cells by the VHF-GD technique, Technical Digest of the International PVSEC-11, Sapporo, 1999.
19. O. Vetterl, A. Lambertz, F. Finger, B. Rech, O. Kluth, H. Wagner, Thickness dependence of microcrystalline silicon solar cell properties, Technical Digest of the International PVSEC-11, Sapporo, 1999.
20. L. Feitknecht, O. Kluth, Y. Ziegler, X. Niquille, P. Torres, J. Meier, N. Wyrsch, A. Shah, Microcrystalline NIP solar cells deposited at A°/sec by VHF-GD, Technical Digest of the International PVSEC-11, Sapporo, 1999.
21. B. Rech, T. Roschek, J. Müller, S. Wieder, H. Wagner, Amorphous and microcrystalline silicon solar cells prepared at high deposition rates using RF (13.56 MHz) plasma excitation frequencies, Technical Digest of the International PVSEC-11, Sapporo, 1999.
22. J.K. Rath, K.F. Feenstra, C.H.M. van der Werf, Z. Hartman, R.E.I. Schropp, Profiled Hot-Wire CVD poly-Si:H Films for an n-i-p cell on a metal substrate, 2nd World Conference and Exhibition on Photovoltaic Solar Energy Conversion, Vienna, 1998.
23. R.E.I. Schropp, P.F.A. Alkemade, J.K. Rath, Thin film poly-silicon solar cells with low impurity concentration made by hot wire chemical vapor deposition, Technical Digest of the International PVSEC-11, Sapporo, 1999.
24. S. Taira, M. Tsukiji, T. Matsui, T. Toyama, H. Okamoto, Polycrystalline Si thin-film solar cell formed on highly-crystallised-seed layer, Technical Digest of the International PVSEC-11, Sapporo, 1999.
25. J. Guillet, S.C. Saha, B. Equer, J.E. Bourée, J.P. Kleider, C. Longeaud, Study of microcrystalline silicon films by hot-wire CVD at low filament temperature, 2nd World Conference on PV Solar Energy Conversion, Vienna, 1998.
26. H. Yamamoto, M. Isomur, M. Kondo, A. Matsuda, Effects of substrates with different properties on microcrystalline silicon films, Technical Digest of the International PVSEC-11, Sapporo, 1999.
27. R. Rogel, K. Kis-sion, T. Mohammed-Brahim, M. Sarret, O. Bonnaud, J.P. Kleider, High Quality LPCVD poly-crystalline silicon films in solar cell applications, 2nd World Conference and Exhibition on Photovoltaic Solar Energy Conversion, Vienna, 1998.
28. R. Iiduka, A. Heya, H. Matsumura, Sol. Energy Mater. Sol. Cells 48 (1997) 279.
29. A.Q. He, A. Heya, N. Otsuka, H. Matsumura, Jpn. J. Appl. Phys. 37 (1998) 92.
30. 4 gas, Technical Digest of the International PVSEC-11, Sapporo, 1999.
31. K. Saito, M. Sano, K. Matzuda, T. Kondo, M. Higasikawa, T. Kariya, High efficiency microcrystalline silicon solar cells by the low temperature CVD method, Technical Digest of the International PVSEC-11, Sapporo, 1999.
32. T. Sasaki, M. Ryoji, Y. Ichikawa, M. Tohkai, Sol. Energy Mater. Sol. Cells 49 (1997) 81.
33. M. Imaizumi, T. Ito, K. Okitsu, K. Yamaguchi, T. Hara, M. Ban, M. Tokai, K. Kawamura, Growth of microcrystalline silicon film by electron beam excited plasma CVD without hydrogen dilution, 2nd World Conference on PV Solar Energy Conversion, Vienna, 1998.
34. T. Ito, K. Yamaguchi, K. Okitsu, M. Imaizumi, I. Konomi, M. Yamaguchi, T. Hara, M. Ban, M. Tokai, K. Kawamura, Hydrogen content in microcrystalline silicon films formed by electron beam excited plasma CVD, 2nd World Conference and Exhibition on Photovoltaic Solar Energy Conversion, Vienna, 1998.
35. M. Vieira, M. Fernandes, A. Fantoni, S. Koynov, A. Macarico, R. Schwarz, Photocurrent in microcrystalline hydrogenated silicon p-i-n junctions, 2nd World Conference and Exhibition on Photovoltaic Solar Energy Conversion, Vienna, 1998.
36. L. Wang, M. Gu, H.S. Reehal, Low temperature growth of crystalline silicon thin films by ECR plasma CVD for solar cells, 2nd World Conference and Exhibition on Photovoltaic Solar Energy Conversion, Vienna, 1998.
37. H.L. Hwang, K.C. Wang, K.C. Hsu, T.-R. Yew, J.J. Loferski, Prog. Photovolt. Res. Appl. 4 (1996) 165.
38. S. Bae, A. Kaan Kalkan, S. Cheng, S.J. Fonash, J. Vac. Sci. Technol. 16 (3) (1998) 1912.
39. K. Kamisako, N. Andoh, L. Lo, T. Kambashi, M. Hatta H. Nagayoshi, T. Sameshima, Characterisation of microcrystalline silicon films prepared by hydrogen-radical CVD method, 2nd World Conference and Exhibition on Photovoltaic Solar Energy Conversion, Vienna, 1998.
40. T. Akasaka, I. Shimizu, J. Non-Cryst. Solids 198-200 (1996) 883.
41. N. Andoh, K. Hayashi, T. Shirasawa, T. Sameshima, K. Kamisako, Effect of film thickness on electrical property of μc-Si:H, Technical Digest of the International PVSEC-11, Sapporo, 1999.
42. N. Andoh, K. Kamisako, T. Sameshima, T. Saitoh, Epitaxial growth of polycrystalline films formed by microwave plasma chemical vapor deposition at low temperatures, Technical Digest of the International PVSEC-11, Sapporo, 1999.
43. B.Y. Moon, J.H. Youn, S.H. Won, J. Jang, Polycrystalline silicon film deposited by ICP-CVD, Technical Digest of the International PVSEC-11, Sapporo, 1999.
44. M. Ichikawa, J. Takeshita, T. Tsushima, A. Yamada, M. Konagai, High rate deposition of polycrystalline silicon thin films by hot wire cell method using disilane, Technical Digest of the International PVSEC-11, Sapporo, 1999.
45. H.N. Wanka, M.B. Schubert, A. Hierzenberger, V. Baumung, Prospects of microcrystalline silicon from hot-wire CVD for photovoltaic applications, 14th European Photovoltaic Solar Energy Conference, Barcelona, 1997.
46. J.K. Rath, H. Meiling, R.E.I. Schropp, Sol. Energy Mater. Sol. Cells 48 (1997) 335.
47. J.K. Rath, H. Meiling, R.E.I. Schropp, Jpn. J. Appl. Phys. 36 (1997) 5436.
48. P. Müller, I. Beckers, E. Conrad, L. Elstner, W. Fuhs, Application of low-temperature electron cyclotron resonance CVD to silicon thin-film solar cell preparation, 25th Photovoltaic Solar Conference, Washington, 1996.
49. J. Musil, Vacuum 47 (2) (1996) 145.
50. K.Y. Choi, C.W. Lee, C. Lee, Jpn. J. Appl. Phys. 34 (1995) 4673.
51. K.E. Lee, W.H. Lee, S.-S. Shin, C. Lee, Jpn. J. Appl. Phys. 35 (1996) L1241.
52. Y. Mishima, M. Takei, T. Uematsu, N. Matsumoto, T. Kakehi, U. Wakino, M. Okabe, J. Appl. Phys. 78 (1) (1995) 217.
53. M. Sarret, T. Mohhammed-Brahim, R. Rogel, P. Münster, D. Guillet, F. le Bihan, O. Bonnaud, Sub-atmospheric CVD as new high rate deposition technique of Silicon films on glass, 2nd World Conference and Exhibition on Photovoltaic Solar Energy Conversion, Vienna, 1998.
54. R.L. Wallace, W.A. Amderson, K.M. Jones, Ahrenkiel, Solution grown polysilicon for photovoltaic devices, 25th Photovoltaic Solar Conference, Washington, 1996.
55. N. Beldi, K. Kis-sion, D. Briand, T. Mohammed-Brahim, M. Sarret, F. le Bihan, O. Bonnaud, J.P. Kleider, C. Longeaud, A.R. Middya, J. Guillet, Hot-wire hydrogen passivation of polycrystalline silicon films deposited by LPCVD, 14th European Photovoltaic Solar Energy Conference, Barcelona, 1997.
56. R.B. Bergmann, R.M. Hausner, N. Jensen, M. Grauvog, L. Oberbeck, T. Rinke, M.B. Schubert, C. Zaczek, R. Dassow, J.R. Kohler, U. Rau, S. Oelting, J. Krinke, H.P. Strunk, J.H. Werner, High rate, low temperature deposition of crystalline silicon films for thin film solar cells on glass, 2nd World Conference and Exhibition on Photovoltaic Solar Energy Conversion, Vienna, 1998.
57. S. Oelting, D. Martini, H. Köppen, D. Bonnet, Ion-assisted deposition of cry stalline thin film silicon solar cells, 13th European Photovoltaic Solar Energy Conference, Nice, 1995.
58. R.B. Bergmann, C. Zaczek, N. Jensen, S. Oelting, J.H. Werner, Appl. Phys. Lett. 72 (1998) 2996.
59. J. Kühnle, R.B. Bergmann, S. Oelting, J. Krinke, H.P. Strunk, J.H. Werner, Polycrystalline silicon films on glass for solar cells by ion-assisted deposition 14th European Photovoltaic Solar Energy Conference, Barcelona, 1997.
60. R.S. Sposili, J.S. Im, Appl. Phys. Lett. 69 (19) (1996).
61. G. Andra, J. Bergmann, F. Falk, E. Ose, Laser induced crystalisation: a method for preparing silicon thin film solar cells. 26th Photovoltaic Specialists Conference, Anaheim 1997, 639.
62. G. Andra, J. Bergmann, F. Falk, E. Ose, N.D. Sinh, Properties of laser crystallised silicon thin films for solar cells, 2nd World Conference and Exhibition on Photovoltaic Solar Energy Conversion, Vienna, 1998.
63. G. Andrä, J. Bergmann, F. Falk, E. Ose, N.D. Sinh, Polycrystalline absorber films for thin film solar cells prepared by laser crystallization Technical Digest of the International PVSEC-11, Sapporo, 1999.
64. R.B. Bergmann, J. Köhler, R. Dassow, C. Zaczek, J.H. Werner, Phys. Stat. Sol. 166 (1998) 587.
65. O. Nast, T. Puzzer, L.M. Koschier, A.B. Sproul, S.R. Wenham, Appl. Phys. Lett. 73 (1999) 3214.
66. O. Nast, S. Brehme, S. Pritchard, A.G. Aberle, S.R. Wenham, Aluminium-induced crystallisation of silicon on glass for thin-film solar cells, Technical Digest of the International PVSEC-11, Sapporo (1999) 727-728.
67. K. Ishikawa, M. Ozawa, C.-H. Oh, M. Matsumura, Jpn. J. Appl. Phys. 37 (1998) 731.
68. K. Niira, H. Hakuma, M. Komoda, K. Fukui, K. Shirasawa, Thin film poly-Si formation for solar cells by Fluz method and Cat-CVD method, Technical Digest of the International PVSEC-11, Sapporo (1999) 751-752.
69. R.B. Bergmann, G. Oswald, M. Albrecht, V. Gross, Sol. Energy Mater. Sol. Cells 46 (1997) 147.
70. A. Lambertz, B.S. Richards, A.B. Sproul, T. Puzzer, M. Gross, Sputter deposited and solid phase crystallized silicon films for solar cells, 2nd World Conference and Exhibition on Photovoltaic Solar Energy Conversion, Vienna, 1998.
71. M.L. Addonizio, P. Delli Veneri, G. Fameli, S. Loreti, C. Minarini, C. Privato, G. Sino, E. Terzini, M. Vancini, Properties of solid phase crystallized poly-si thin film from PECVD a-Si:H deposited on quartz substrate, 2nd World Conference and Exhibition on Photovoltaic Solar Energy Conversion, Vienna, 1998.
72. R.L. Wallace, B. Jagannathan, X. Gu, N. Sridhar, K. Etemadi, D.D.L. Chung, W.A. Anderson, J. Coleman, Low-cost, thin-film silicon for terrestrial solar cells, NREL/SNL Photovoltaics Program Review, Proceedings of the 14th Conference - A Joint Meeting, 1996, p. 511.
73. A.T. Voutsas, Jpn. J. Appl. Phys. 37 (1998) 388.
74. Y. Zhao, Z. Li, F. Yun, X. Liao, Z. Ma, G. Yue, H. Kiao, J. He, G. Kong, Polycrystalline silicon films prepared by an improved pulsed rapid thermal annealing, 2nd World Conference and Exhibition on Photovoltaic Solar Energy Conversion, Vienna, 1998.
75. M. Boreland, E. Illy, "Through-the-glass", double-sided laser crystallisation using copper vapour lasers for the production of thin film silicon material, Technical Digest of the International PVSEC-11, Sapporo (1999) 547-548.
76. D. Toet, B. Koopmans, P.V. Santos, R.B. Bergmann, B. Rcichards, Appl. Phys. Lett. 69 (1996) 3719.
77. E. Conrad, L. Elstner, W. Fuhs, W. Henrion, P. Müller, J. Poortmans, B. Selle, U. Zeimer, Low-temperature homoepitazy of silicon by electron cyclotron resonance CVD, 14th European Photovoltaic Solar Energy Conference, Barcelona, 1997.
78. G.F. Zheng, Z. Shi, R. Bergmann, Z. Dai, S. Robinson, A. Wang, J. Kurianski, M.A. Green, Sol. Energy Mater. Sol. Cells 32 (1994) 129.
79. K. Fujimoto, F. Nakabeppu, Y. Sogawa, Y. Okayasu, K. Kumagai, Development of thin film solar cells using PCVD process, IEEE Conference (1993) 83.
80. P. Müller, E. Conrad, T.R. Omstead, P. Kember, Deposition of poly-Si-based dielectrics by ECRCVD and RTCVD, 13th European Photovoltaic Solar Energy Conference, Nice, 1995, 1742.
81. T. Ito, H. Azuma, K. Yamaguchi, M. Imaizumi, H. Fukushima, M. Yamaguchi, T. Hara, M. Ban, M. Tohkai, K. Kawamura, Thin film silicon solar cells fabricated by electron beam excited plasma CVD, Technical Digest of the International PVSEC-11, Sapporo 1999 (769-770).
82. S. Hamma, P. Roca i Cabarrocas, In-Situ correlation between the optical, structural, electrical properties of ultra-thin N and P-type microcrystalline silicon films, 14th European Photovoltaic Solar Energy Conference, Barcelona, 1997.
83. T. Oshima, M. Sano, A. Yamada, M. Konagai, K. Takahashi, Appl. Surf. Sci. 79/80 (1994) 215.
84. R. Rüther, J. Livingstone, N. Dytlewski, Polycrystalline silicon thin films with increased grain size obtained by low-temperature stepwise annealing of amorphous silicon, 2nd World Conference and Exhibition on Photovoltaic Solar Energy Conversion, Vienna, 1998.
85. K. Sasaki, T. Takada, Jpn. J. Appl. Phys. 37 (1998) 402.
86. J. Bloem, J. Crystal Growth 50 (1980) 581.
87. D. Angermeier, R. Monna, A. Slaoui, J.C. Muller, C.J. Tool, J.A. Roosmalen, S. Acosta, A. Ayral, Analysis of silicon thin films on dissimilar substrates deposited by RTCVD for photovoltaic application, 14th European PV Solar Energy Conference, Barcelona, 1997, p. 1452.
88. A. Slaoui, R. Monna, D. Angermeier, S. Bourdais, J.C. Muller, Polycrystalline silicon films on foreign substrates by a rapid thermal-CVD technique, 26th IEEE PV Specialists Conference, Anaheim, 1997, p. 627.
89. S. Bourdais, R. Monna, D. Angermeier, A. Slaoui, N. Rauf, A. Laugier, F. Mazel, Y. Jorand, G. Fantozzi, Combination of RT-CVD and LPE for thin silicon-film formation on alumina substrates, 2nd World Conference on PV Solar Energy Conversion, Vienna, 1998, p. 1774.
90. G. Beaucarne, C. Hebling, R. Scheer, J. Poortmans, Thin silicon solar cells based on recrystallised layers on insulating substrates, 2nd World Conference on PV Solar Energy Conversion, Vienna, 1998, p. 1794.
91. G. Beaucarne, J. Poortmans, M. Caymax, J. Nijs, R. Mertens, CVD-growth of crystalline Si on amorphous or microcrystalline substrates, 14th European PV Solar Energy Conference, Barcelona, 1997, p. 1007.
92. 3, Technical digest of the International PVSEC-11, Sapporo, 1999.
93. K. Kita, H. Yamatsugu, C. Wen, H. Komiyama, K. Yamada, Zone-defined growth of multicrystalline silicon film from metal-silicon solution, Technical digest of the International PVSEC-11, Sapporo, 1999.
94. A.J. van Zutphen, A. von Keitz, M. Zeman, J.W. Metselaar, Film-silicon deposition followed by phosphorus diffusion for photovoltaic application, 2nd World Conference on PV Solar Energy Conversion, Vienna, 1998, p. 1762.
95. D. Angermeier, R. Monna, S. Bourdais, A. Slaoui, J.C. Muller, G. Beaucarne, J. Poortmans, Thin polysilicon films on mullite substrates for photovoltaic cell application, 2nd World Conference on PV Solar Energy Conversion, Vienna, 1998, p. 1778.
96. A. Fave, B. Semmache, J.M. Olchowik, A. Laugier, F. Mazel, G. Fantozzi, S. Bourdais, A. Slaoui, Silicon thin film formation by liquid phase epitaxy on mullite substrates with RTCVD polysilicon seed layer, Technical digest of the International PVSEC-11, Sapporo, 1999.
97. A. Gutjahr, I. Silier, G. Cristiani, M. Konuma, F. Banhart, V. Schöllkopf, H. Frey, Silicon solar cell structure grown by liquid phase epitaxy on glassy carbon, 14th European PV Solar Energy Conference, Barcelona, 1997, p. 1460.
98. M. Pauli, T. Reindl, W. Krühler, F. Homberg, J. Müller, Sol. Energy Mater. Sol. Cells 41/42 (1996) 119.
99. F. Tamura, Y. Okayasu, K. Kumagai, Sol. Energy Mater. Sol. Cells 1994 (34) 263.
100. S.E. Schiermeier, C.J. Tool, J.A. van Roosmalen, L.J. Laas, A. von Keitz, W.C. Sinke, LPE-growth of crystalline silicon layers on ceramic substrates, 2nd World Conference on PV Solar Energy Conversion, Vienna, 1998, p. 1673.
101. A. von Keitz, J.A. van Roosmalen, C.J. Tool, S.E. Schiemeier, A.J. van Zutphen, F. Fung, G.M. Christie, Improvement of low cost ceramic substrates for use in thin film silicon solar cells, 2nd World Conference on PV Solar Energy Conversion, Vienna, 1998, p. 1829.
102. A. von Keitz, S.E. Schiermeier, A.J. van Zutphen, C.J. Tool, F. Fung, J.A. van Roosmalen, G.M. Christie, Film silicon solar cells on ceramic substrates, 8th Workshop on Crystalline Silicon Solar Cell Materials and Processes, Colorado, 1998, p. 221.
103. N.I. Nemchuck, J.G. Couillard, D.G. Ast, F.P. Fehlner, L.R. Pinckney, Novel glass-ceramic substrates for thin film polycrystalline silicon solar cells, 9th Workshop on Silicon Solar Cells, Colorado, 1999.
104. Z. Shi, T.L. Young, G.F. Zheng, M.A. Green, Sol. Energy Mater. Sol. Cells 31 (1993) 51.
105. Z. Shi, T.L. Young, M.A. Green, Solution growth of polycrystalline silicon on glass at low temperatures, 1st World Conference on PV Energy Conversion, Hawaii, 1994, p. 1579.
106. Y. Laghla, E. Scheid, H. Vergnes, J.P. Couderc, Sol. Energy Mater. Sol. Cells 48 (1997) 303.
107. Y. Laghla, H. Vergnes E. Scheid, J.P. Couderc, Production of cheaper silicon polycrystalline diodes and photovoltaic cells by LPCVD, 14th European Photovoltaic Solar Energy Conference, Barcelona, 1997.
108. R.B. Bergmann, R. Brendel, M. Wolf, P. Lölgen, J.H. Werner, Crystalline silicon films by chemical vapor deposition on glass for thin film solar cells, 2nd World Conference and Exhibition on Photovoltaic Solar Energy Conversion, Vienna, 1998.
109. R.B. Bergmann, R. Brendel, M. Wolf, P. Lolgen, J. Krink, H.P. Strunk, J.H. Werner, Semicond. Sci. Techno. 12 (1997) 224.
110. R. Brendel, R.B. Bergmann, P. Lölgen, M. Wolf, J.H. Werner, Appl. Phys. Lett. 70 (1997) 390.
111. R. Brendel, R.B. Bergmann, B. Fischer, J. Krinke, R. Plieninger, U. Rau, J. Reiß, H.P. Strunk, H. Wanka, J.H. Werner, Transport analysis for polycrystaline silicon solar cells on glass substrates, 26th Photovoltaic Solar Conference, Anaheim, 1997.
112. R.B. Bergmann, C. Hebling, I. Ullmann, E. Bischoff, J.H. Werner, Zone-melting recrystallisation of silicon films on glass, 14th European PV Solar Energy Conference, Barcelona, 1997, p. 1464.
113. Y. Bai, D.H. Ford, J.A. Rand, R.B. Hall, A.M. Barnett, 16.6% efficient Silicon-Film polycrystalline silicon solar cells, 26th IEEE PV Specialists Conference, Anaheim, 1997, p. 35.
114. D.H. Ford, J.A. Rand, A.M. Barnett, E.J. DelleDonne, A.E. Ingram, R.B. Hall, Development of light-trapped, interconnected silicon-film modules, 26th IEEE PV Specialists Conference, Anaheim, 1997, p. 631.
115. A.M. Barnett, J.A. Rand, R.B. Hall, D.H. Ford, E.J. DelleDonne, A.E. Ingram, J.C. Bisaillon, B.W. Feyock, M.G. Mauk, P.E. Sims, High current, thin silicon-on-ceramic solar cell, Technical Digest of the International PVSEC-11, Sapporo, 1999.
116. ™ solar cells, 14th European PV Solar Energy Conference, Barcelona, 1997, p. 999.
117. 2 barrier layers for crystalline silicon thin-film solar cells, 2nd World Conference of PV Solar Energy Conversion, Vienna, 1998, p. 1798.
118. C. Hebling, S. Reber, K. Schmidt, R. Lüdemann, F. Lutz, Oriented recrystallisation of silicon layers for silicon thin-film solar cells, 26th IEEE PV Specialists Conference, Anaheim, 1997, p. 623.
119. S. Reber, W. Zimmerman, T. Kieliba, S.W. Glunz, Zone melting recrystallization of silicon films for crystalline silicon thin film solar cells, Technical Digest of the International PVSEC-11, Sapporo, 1999.
120. R. Lüdemann, S. Schaefer, C. Schüle, C. Hebling, Dry processing of mc-silicon thin-film solar cells on foreign substrates leading to 11% efficiency, 26th IEEE PV Specialists Conference, Anaheim, 1997, p. 159.
121. T. Mishima, Y. Kitagawa, S. Ito, T. Yokoyama, Polycrystalline silicon films for solar cells by liquid phase epitaxy, 2nd World Conference on PV Solar Energy Conversion, Vienna, 1998, p. 1724.
122. S. Ito, Y. Kitagawa, T. Mishima, T. Yokoyama, Direct-grown polycrystalline Si film on carbon substrate by LPE, Technical Digest of the International PVSEC-11, Sapporo, 1999.
123. T. Takahashi, R. Shimokawa, Y. Matsumoto, K. Ishii, T. Sekigawa, Sol. Energy Mater. Sol. Cells 48 (1997) 327.
124. R. Shimokawa, K. Ishii, H. Nishikawa, T. Takahashi, Y. Hayashi, I. Saito, F. Nagamine, S. Igari, Sol. Energy Mater. Sol. Cells 34 (1994) 277.
125. R. Monna, D. Angermeier, A. Slaoui, J.C. Muller, G. Beaucarne, J. Poortmans, C. Hebling, Poly-Si thin films on graphite substrates by rapid thermal chemical vapour deposition for photovoltaic application, 14th European PV Solar Energy Conference, Barcelona, 1997, p. 1456.
126. H. v. Campe, D. Nikl, W. Schmidt, F. Schomann, Crystalline silicon thin film solar cells, 13th European PV Solar Energy Conference, Nice, 1995, p. 1489.
127. T. Yamada, T. Nishioka, M. Tachikawa, T. Yamada, Deposition of polycrystalline silicon with large grain size from Al-Si melt, Technical Digest of the International PVSEC-11, Sapporo, 1999.
128. B.v. Ehrenwall, C. Schmidt, A. Braun, M. Nell, H.-G. Wagemann, Analysis of silicon growth on structured ceramic substrate for photovoltaic application, 2nd World Conference on PV Solar Energy Conversion, Vienna, 1998, p. 1370.
129. C. Schmidt, B.v. Ehrenwall, A. Braun, A. Püschel, S. Ruckmich, B. Tierock, M. Nell, H.-G. Wagemann, Silicon deposition on structured ceramic substrates for thin film solar cells, 14th European PV Solar Energy Conference, Barcelona, 1997, p. 2694.
130. T. Kunze, S. Hauttmann, S. Kramp, J. Müller, Thin recrystallised silicon seed layers on graphite substrates, 14th European PV Solar Energy Conference, Barcelona, 1997, p. 1407.
131. M.A. Green, IEEE Trans. Electron Dev. 31 (1984) 671.
132. T. Tiedje, E. Yablonovitch, G.D. Cody, B.G. Brooks, IEEE Trans. Electron Dev. 31 (1984) 711.
133. A. Wang, J. Zhao, S.R. Wenham, M.A. Green, Progress in Photovoltaics 4 (1996) 55.
134. R. Brendel, M. Hirsch, R. Plieninger, J.H. Werner, Experimental analysis of quantum efficiency for thin layer silicon solar cells with back surface fields and light trapping schemes, 13th European PV Solar Energy Conference, Nice, 1995.
135. A. Blakers, Festkoerperprobleme/Adv. Solid State Phys. 51 (1990) 385.
136. D.A. Clugston, P.A. Basore, PC1D Version 5: 32-bit solar cell modelling on personal computers, 26th IEEE PV Specialists Conference, Anaheim, 1997.
137. M. Imaizumi, T. Ito, M. Yamaguchi, K. Kaneko, Effect of grain size and dislocation density on the performance of thin film polycrystalline silicon solar cells, 14th European PV Solar Energy Conference, Barcelona, 1997.
138. M. Imaizumi, T. Ito, M. Yamaguchi, K. Kaneko, J. Appl. Phys. 81 (11) (1997) 7635.
139. J. Dicker, J.O. Schumacher, S.W. Glunz, W. Warta, Characterisation of high-efficiency silicon solar cells with rear side contacts, 2nd World Conference on PV Solar Energy Conversion, Vienna, 1998.
140. C. Hebung, S.W. Glunz, J.O. Schumacher, J. Knobloch, High-Efficiency (19.2%) silicon thin-film solar cells with interdigitated emitter and base front-contacts, 14th European PV Solar Energy Conference, Barcelona, 1997.
141. C. Hebling, S.W. Glunz, C. Schetter, J. Knobloch, A. Räuber, Sol. Energy Mater. Sol. Cells 48 (1997) 335.
142. S. Roberts, K.C. Heasman, T.M. Bruton, R.W. Russell, D.W. Cunningham, Interdigitated-contact silicon solar cells made without photolithography, 2nd World Conference on PV Solar Energy Conversion, Vienna, 1998.
143. S.A. Edmiston, A.B. Sproul, M.A. Green, S.R. Wenham, Prog. Photovolt. 3 (1995) 333.
144. S.R. Wenham, M.A. Green, S. Edmiston, L. Koschier, P. Campbell, C. Honsberg, A.B. Sproul, Z. Shi, D. Thorpe, G. Heiser, Sol. Energy Mater. Sol. Cells 41/42 (1996) 3.
145. M.A. Green, Prog. Photovolt. 4 (1996) 375.
146. J. Zhao, A. Wang, G.F. Zheng, S.R. Wenham, M.A. Green, Improved performance of multilayer silicon solar cells, 13th European PV Solar Energy Conference, Nice, 1995.
147. M.A. Green, J. Zhao, G.F. Zheng, High efficiency crystalline silicon multilayer solar cells, 14th European PV Solar Energy Conference, Barcelona, 1997.
148. M. Keevers, Fabrication and characterisation of parallel multijunction thin film silicon solar cells, Technical Digest of the International PVSEC-11, Sapporo, 1999.
149. G.A. Hurkx, D.B. Klaassen, M.P. Knuvers, IEEE Trans. Electron. Dev. 39 (1992) 331.
150. A. Schenk, Solid-State Electron. 35 (11) (1992) 1585.
151. M.J. Stocks, A. Cuevas, A.W. Blakers, Prog. Photovolt. 4 (1996) 35.
152. M.J. Stocks, A.W. Blakers, Junction recombination in multilayer silicon solar cells, 13th European PV Solar Energy Conference, Nice, 1995.
153. M. Goldbach, U. Rau, J. Parisi, Numerical optimization of the multijunction solar cell, 13th European PV Solar Energy Conference, Nice, 1995.
154. K. Brecl, M. Gerzelj, F. Smole, S. Amon, J. Furlan, Modelling multilayer solar cell structures, 2nd World Conference on PV Solar Energy Conversion, Vienna, 1998.
155. U. Rau, T. Meyer, M. Goldbach, R. Brendel, J. Werner, Numerical simulation of innovative device structures for silicon thin-film solar cells, 25th IEEE PV Specialists Conference, Washington, 1996.
156. J.M. Gee, W.K. Schubert, P.A. Basore, Emitter wrap-through solar cell, 23rd IEEE Photovoltaic Specialists Conference, 1993.
157. M. Deguchi, Y. Kawama, Y. Matsuno, Y. Nishimoto, Ho. Morikawa, S. Arimoto, H. Kumabe, T. Murotani, Prospect of the high efficiency for the VEST (via-hole etching for the separation of thin films) cell, 1st World Conference on Photovoltaic Energy Conversion, Hawaii, 1994.
158. G.F. Zheng, W. Zhang, Z. Shi, D. Thorp, R.B. Bergmann, M.A. Green, Sol. Energy Mater. Sol. Cells 51 (1988) 95.
159. G.F. Zheng, W. Zhang, Z. Shi, D. Thorp, M.A. Green, High-efficiency drift-field thin-film silicon solar cells by liquid-phase epitaxy and substrate thinning, 25th IEEE PV Specialists Conference, Washington, 1996.
160. K.J. Weber, A. Cuevas, A.W. Blakers, Sol. Energy Mater. Sol. Cells 45 (1997) 151.
161. S.W. Glunz, J. Knobloch, C. Hebling, W. Wettling, The range of high-efficiency silicon solar cells fabricated at Fraunhofer ISE, 26th IEEE PV Specialists Conference, Anaheim, 1997.
162. ™ modules, 26th World Conference on PV Solar Energy Conversion, Vienna, 1998.
163. K.P. Shreve, L.C. DiNetta, J.E. Cotter, T.R. Ruffins, A.M. Barnett, Initial results for the silicon monolithically interconnected solar cell product, 25th IEEE PV Specialists Conference, Washington, 1996.
164. H. Takato, T. Sekigawa, R. Shimokawa, Fabrication of integrated silicon-on-insulator solar cells, 2nd World Conference on PV Solar Energy Conversion, Vienna, 1998.
165. H. Takato, T. Sekigawa, Numerical analysis of integrated thin crystalline-silicon cells having p-n tunnel junctions, 14th European PV Solar Energy Conference, Barcelona, 1997.
166. R. Brendel, S. Oelting, A novel process for the integrated series connection of crystalline thin-film silicon solar cells, Technical Digest of the International PVSEC-11, Sapporo, 1999.
167. D. Thorp, Methods of contacting multijunction silicon photovoltaic modules, 14th European PV Solar Energy Conference, Barcelona, 1997.
168. S.A. Edmiston, D.A. Clugston, S.R. Wenham, M.A. Green, Bypass Zener diode protection for thin film crystalline silicon multilayer solar cells, 13th European PV Solar Energy Conference, Nice, 1995.
169. H.A. Aulich, Advances in thin film pv-technologies, 13th European PV Solar Energy Conference, Nice, 1995, p. 1441.
170. W.N. Shafarman, B.M. Basol, J.S. Britt, R.B. Hall, R.E. Rocheleau, Prog. Photovolt. 5 (1997) 359.
171. K.A. Münzer, K.T. Holdermann, R.E. Schlosser, S. Sterk, Improvements and benefits of thin crystalline silicon solar cells, 2nd World Conference on PV Solar Energy Conversion, Vienna, 1998.
172. Y.S. Tsuo, J.M. Gee, P. Menna, D.S. Strebkov, A. Pinov, V. Zadde, Environmentally benign silicon solar cell manufacturing, 2nd World Conference on PV Solar Energy Conversion, Vienna, 1998, p. 1199.
173. H. Kiess, P. Toggweiler, Mathematical analysis to quantify the relevance of cell and panel efficiency on the economics of photovoltaics, 2nd World Conference on PV Solar Energy Conversion, Vienna, 1998, p. 172.
174. K. Zweibel, Prog. Photovolt. 3 (1995) 279.
175. S.J. Durand, Prog. Photovolt. 2 (1994) 107.